2020
DOI: 10.3390/s20123439
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Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Abstract: Based on the prior work on the six degrees of freedom (6DOF) motion errors measurement system for linear axes, and for the different types of machine tools and different installation methods, this study used a ray tracing idea to establish the measurement models for two different measurement modes: (1) the measurement head is fixed and the target mirror moves and (2) the target mirror is fixed and the measurement head moves. Several experiments were performed on the same linear guide using two different measur… Show more

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Cited by 15 publications
(5 citation statements)
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“…The position and movement of objects in the environment are inextricably linked with the turns and rotations of objects. In the engineering practice of creating, manufacturing and operating aircraft, spacecraft, ships and other mechanical systems, the concept of six degrees of freedom (6DoF) is used [37][38][39][40]. It determines the number of independent parameters that characterize the configuration, as well as the possibility of changing the relative orientation of objects in the environment.…”
Section: L L′mentioning
confidence: 99%
“…The position and movement of objects in the environment are inextricably linked with the turns and rotations of objects. In the engineering practice of creating, manufacturing and operating aircraft, spacecraft, ships and other mechanical systems, the concept of six degrees of freedom (6DoF) is used [37][38][39][40]. It determines the number of independent parameters that characterize the configuration, as well as the possibility of changing the relative orientation of objects in the environment.…”
Section: L L′mentioning
confidence: 99%
“…And for the direct measurement method,in order to realize the measurement of the single error of the machine tool, the optical instrument is mainly used to identify the changes in the reflected optical path of the optical mirror group as the machine tool moves. Such methods include laser tracker measurements [12,13] , laser interferometers [14][15][16] and 1D spherical error array measurements [17] . The laser interferometer measurement method is widely used due to the advantages of measurement efficiency and it has become the main research direction on error compensation.…”
Section: Introductionmentioning
confidence: 99%
“…However, the above-mentioned methods have different kinds of shortcomings. For instance, the laser interferometer measurement system, which is widely used in the field of ultraprecision measurement and ultra-precision machine tools, can achieve very high resolution [6]. More sensitive temperature, humidity and other sensors are integrated into the system to achieve more stable measurement of nanoscale measurement tasks.…”
Section: Introductionmentioning
confidence: 99%