Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals

Kim, Kyungrim; Zhang, Shujun; Salazar, Giovanni; Jiang, Xiaoning

doi:10.1016/j.sna.2012.02.003

Cited by 73 publications

(48 citation statements)

References 35 publications

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“…In comparison with capacitive and piezoresistive accelerometers, piezoelectric accelerometers exhibit a wide operating frequency range, as well as cost-efficiency, stability, rapid response, ease of integration, and excellent repeatability [3,62,63]. Piezoelectric accelerometers are usually non-resonant sensors, with the operation frequency lower than the fundamental resonant frequency.…”

Section: Relaxor-pt Accelerometersmentioning

confidence: 99%

Relaxor-PT Single Crystal Piezoelectric Sensors

Jiang

Kim

2014

Crystals

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Relaxor-PbTiO 3 piezoelectric single crystals have been widely used in a broad range of electromechanical devices, including piezoelectric sensors, actuators, and transducers. This paper reviews the unique properties of these single crystals for piezoelectric sensors. Design, fabrication and characterization of various relaxor-PT single crystal piezoelectric sensors and their applications are presented and compared with their piezoelectric ceramic counterparts. Newly applicable fields and future trends of relaxor-PT sensors are also suggested in this review paper.

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Section: Relaxor-pt Accelerometersmentioning

confidence: 99%

Relaxor-PT Single Crystal Piezoelectric Sensors

Jiang

Kim

2014

Crystals

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“…In this work, SAW resonators were deposited on LGS substrates with Euler angle of (0°, 138.5°, 117°) (device A) and (0°, 138.5°, 27°) (device B) and YCa 4 O(BO 3 ) 3 substrates with cutting type of X-90°(device C) and Z-90° (device D). The SAW resonators in this work had a typical structure of one port SAW resonator as shown in Fig.…”

Section: Methodsmentioning

confidence: 99%

“…There has been an increasing demand for sensors which can work wirelessly in harsh environment with high pressure, high temperature and aggressive chemical material. SAW materials like yttrium calcium oxoborate (YCa 4 O(BO 3 ) 3 , YCOB) and Langasite (La 3 Si 5 O 14 , LGS) are capable to work in such environment due to their perfect chemical stability. Both materials have high piezoelectric coefficient, high electromechanical coupling coefficient and high melting points above 1400 °C, making them suitable for work at high temperature.…”

Section: Introductionmentioning

confidence: 99%

“…Both materials have high piezoelectric coefficient, high electromechanical coupling coefficient and high melting points above 1400 °C, making them suitable for work at high temperature. Kyungrim Kim and Shujun Zhang [3] designed and build high temperature vibration sensing applications using YCOB capable to work at temperature range from room temperature to 1000 °C. Langasite had been studied for both high temperature bulk acoustic wave (BAW) and surface acoustic wave applications [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

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High Temperature SAW wireless sensors based on YCOB and Langasite

Peng¹,

Cui²,

Shu³

et al. 2016

Proceedings of the 2016 6th International Conference on Advanced Design and Manufacturing Engineering (ICADME 2016)

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High temperature SAW resonators were fabricated on YCa 4 O(BO 3 ) 3 substrates with cutting type of X-90° and Z-90° and langasite substrates with Euler angle of (0°, 138.5°, 117°) and (0°, 138.5°, 27°). The temperature characteristics of these resonators have been studied in this paper. The results show that resonators on all four substrates have high temperature stability up to 600 °C. The resonance frequency of the SAW resonators based on YCa 4 O(BO 3 ) 3 substrates decrease more linearly with temperature than those on langasite substrates. The temperature sensitivity of SAW resonator with Z-90° YCOB substrates and X-90° YCOB substrates are 21.22 kHz/°C and 13.44 kHz/°C, respectively. It suggests that YCa 4 O(BO 3 ) 3 with cutting type of Z-90° is suitable candidate for piezoelectric substrate used for sensors working in high temperature environment.

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“…Zinc Oxide (ZnO) has also been employed for active piezoelectric film due to its relatively simple and repeatable deposition using single-target RF sputtering, the ability to produce largearea films without pinholes, and proven compatibility with IC (integrated circuit) integration [28][29][30]. Various reports have described piezoelectric accelerometers using other piezoelectric materials such as YCOB crystals, PVDF, TrFE, Pb(Zr,Ti) O 3 , and Pb(Mn 1/3 Nb 2/3 )O 3 [31][32][33]. A cantilever beam accelerometer or energy harvester without a mass at the free end is the simplest of all piezoelectric accelerometers or energy harvesters [22,28,34].…”

mentioning

confidence: 99%

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

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Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals

Cited by 73 publications

References 35 publications

Relaxor-PT Single Crystal Piezoelectric Sensors

Relaxor-PT Single Crystal Piezoelectric Sensors

High Temperature SAW wireless sensors based on YCOB and Langasite

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

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