Piezoelectric sensing is of increasing interest for high-temperature applications in aerospace, automotive, power plants and material processing due to its low cost, compact sensor size and simple signal conditioning, in comparison with other high-temperature sensing techniques. This paper presented an overview of high-temperature piezoelectric sensing techniques. Firstly, different types of high-temperature piezoelectric single crystals, electrode materials, and their pros and cons are discussed. Secondly, recent work on high-temperature piezoelectric sensors including accelerometer, surface acoustic wave sensor, ultrasound transducer, acoustic emission sensor, gas sensor, and pressure sensor for temperatures up to 1,250 °C were reviewed. Finally, discussions of existing challenges and future work for high-temperature piezoelectric sensing are presented.

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The flexoelectric microcantilever offers an alternative approach for the development of micro/nano‐sensors. The transverse flexoelectric coefficients µ12 of barium strontium titanate microcantilevers were measured at room temperature, and found to keep the same value of 8.5 µC/m for microcantilevers with thickness ranging from 30 µm to 1.4 mm. The calculated effective piezoelectric coefficient and electrical energy density of flexoelectric cantilevers are superior to those of their piezoelectric counterparts, suggesting that the flexoelectricity‐induced polarization can be significantly increased as structures are scaled down due to the scaling effect of strain gradient, holding promise for flexoelectric micro/nano cantilever sensing applications. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

In force measurement applications, a piezoelectric force sensor is one of the most popular sensors due to its advantages of low cost, linear response, and high sensitivity. Piezoelectric sensors effectively convert dynamic forces to electrical signals by the direct piezoelectric effect, but their use has been limited in measuring static forces due to the easily neutralized surface charge. To overcome this shortcoming, several static (either pure static or quasistatic) force sensing techniques using piezoelectric materials have been developed utilizing several unique parameters rather than just the surface charge produced by an applied force. The parameters for static force measurement include the resonance frequency, electrical impedance, decay time constant, and capacitance. In this review, we discuss the detailed mechanism of these piezoelectric-type, static force sensing methods that use more than the direct piezoelectric effect. We also highlight the challenges and potentials of each method for static force sensing applications.

A shear-mode piezoelectric accelerometer using YCa4O(BO3)3 (YCOB) single crystal was designed, fabricated and successfully tested for high temperature vibration sensing applications. The prototyped sensor was tested at temperatures ranging from room temperature to 1000 °C and at frequencies ranging from 80 Hz to 1 kHz. The sensitivity of the sensor was found to be 5.7 pC/g throughout the tested frequency and temperature range. In addition, YCOB piezoelectric accelerometers remained the same sensitivity at 1000 °C for a dwell time of four hours, exhibiting high stability and reliability.