Design, fabrication and characterization of force sensors for nanorobot

Domanski, K.; Janus, P.; Grabiec, P.; Pérez, Ricardo; Chaillet, Nicolas; Fahlbusch, Stephan; Sill, A.; Fatikow, Sergej

doi:10.1016/j.mee.2004.12.023

Cited by 13 publications

(5 citation statements)

References 9 publications

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“…MEMS piezoresistive force sensors, which are formed by ion implantation, have also been developed for nanoscaled applications 77,79 . Piezoresistive force sensors were mounted on a nanomanipulator to provide high-accuracy force measurements that range from nanonewtons to millinewtons 84 . By using piezoresistive force sensors, mechanical indentation for stiffness determination of 2D materials and scanning for surface topography were achieved 45 .…”

Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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“…2 (a) and (b), an integrated deflection sensor, and an actuation system. A modification of a double sided silicon micro-machining process developed for manufacturing of piezo-resistive AFM micro-probes has been adapted to fabricate SThM sensors [7]. The SthM/ECM probes on the market are based on bulky and complicated optical deflection sensors [13].…”

Section: Setup Descriptionmentioning

confidence: 99%

Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement

Lenczner

Yang

Cogan

et al. 2016

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and

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In view of qualitative temperature measurement by scanning thermal microscopy, we introduce a model-based control law for a new microfabricated probe. The underlying model is the time-space two-scale electro-thermal model presented in [15], since it has the power to represent transcients of harmonic modulations. The control method accounts for an estimation of the heat source in the sample and for the delay in the lock-in filter based observation. Experiment-based model calibration is a prerequisite and is discussed in detail

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“…A variety of techniques have been developed to facilitate such assembly processes, including the use of microrobotic work cells that utilize methods from traditional robotic manufacturing [3][4][5][6][7][8][9][10][11][12][13][14][15][16]. Visual feedback techniques may be well suited to the assembly of MEMS components in which small lot sizes and diverse parts makes traditional fixturing infeasible [8].…”

Section: Introductionmentioning

confidence: 99%

“…Additionally, the view may become obstructed by the work tool or assembly component during complex assemblies [12]. The integration of force feedback into microgrippers and tweezers for pick and place operations has led to improvements in yield and reliability [9,11,12,[14][15][16]. Similarly, the incorporation of force feedback information from parts interactions during the assembly process will lead to more reliable and robust assembled devices [13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

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Design of a Piezoresistive Surface Micromachined Three-Axis Force Transducer for Microassembly

Roman

Bronson

Wiens

et al. 2005

Microelectromechanical Systems

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One of the challenges facing microrobotic manufacturing is the ability to sense interactions for force-guided assembly of small devices. There is a need for a force transducer with the ability to sense forces in multiple degrees-of-freedom in the mN range with resolution on the order of 10 µN for microassembly applications. This paper presents theoretical studies for developing a surface micromachined piezoresistive force transducer that can measure normal force in the zdirection and moments about the x and y-axes. The devices proposed here are based on a compliant platform design with integrated piezoresistive sensing elements fabricated in a modified SUMMiT process. Various configurations and sensor element layouts are explored to determine the relationship of the applied forces and moments experienced during assembly and the corresponding strain. Structural and finite element analysis is used to determine the elastic response of the device and establish the best locations and orientations of the sensing elements to effectively utilize the piezoresistive effect of the polysilicon sensors. Initial experiments show the polysilicon piezoresistors to have a gauge factor of approximately 25. The expected sensitivities for these devices are presented.

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Design, fabrication and characterization of force sensors for nanorobot

Cited by 13 publications

References 9 publications

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement

Design of a Piezoresistive Surface Micromachined Three-Axis Force Transducer for Microassembly

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