Design and testing of a novel multi-stroke micropositioning system with variable resolutions

Abstract

Multi-stroke stages are demanded in micro-/nanopositioning applications which require smaller and larger motion strokes with fine and coarse resolutions, respectively. This paper presents the conceptual design of a novel multi-stroke, multi-resolution micropositioning stage driven by a single actuator for each working axis. It eliminates the issue of the interference among different drives, which resides in conventional multi-actuation stages. The stage is devised based on a fully compliant variable stiffness mechanism, which exhibits unequal stiffnesses in different strokes. Resistive strain sensors are employed to offer variable position resolutions in the different strokes. To quantify the design of the motion strokes and coarse/fine resolution ratio, analytical models are established. These models are verified through finite-element analysis simulations. A proof-of-concept prototype XY stage is designed, fabricated, and tested to demonstrate the feasibility of the presented ideas. Experimental results of static and dynamic testing validate the effectiveness of the proposed design.

Effective Hybrid Algorithm of Taguchi Method, FEM, RSM, and Teaching Learning-Based Optimization for Multiobjective Optimization Design of a Compliant Rotary Positioning Stage for Nanoindentation Tester

“…And then, the WFs were determined using Equations (9)- (12). Based on the well-established Equations (13) and (14), the multiobjective optimization problem was solved through the TLBO approach. The optimization process was implemented using MATLAB 2017 software.…”

“…Kinetic Structure. A lot of compliant micropositioning stages from one degree of freedom (DOF) [14], 2 DOFs [15], and 3 DOFs [16] were illustrated in Figures 1(a)-1(c), respectively. However, a compliant rotary positioning stage (CRPS) for indentation device has been less researched.…”

Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism

“…As compared with rigid-body mechanism, compliant mechanism eliminates the problems such as clearance, friction, and wears [1]. However, the applications of compliant mechanism are limited because it is hard to make a precision micropositioning system with both a large workspace and multi-degree of freedom (DOF) at the same time [2][3][4][5]. For instance, many applications require a compliant mechanism which has a larger range of work, e.g., the micro-coordinate measuring machines, adaptive adjustment mechanism in astronomical telescope, MEMS processing systems, binary optical processing equipment, and so on [6,7].…”

Compact design of a novel linear compliant positioning stage with high out-of-plane stiffness and large travel

“…A large number of millimeter-scale LCPSs were proposed by researchers. Awtar, 10 Trease et al, 11 Tang et al, 12 Xu, [13][14][15][16] and Yu et al 17 have designed and developed millimeter even centimeter scale LCPSs using planar leaf spring parallelograms (PLSPs), which are hereafter called planar LCPSs. However, there are two main defects of these planar LCPSs: (a) the structures of planar stages are relatively loose.…”