Abstract:Since most of the XY positioning stages with large travel range proposed in previous studies suffer from low out-of-plane stiffness and loose structure, this paper presents a novel two degrees-of-freedom large travel linear compliant positioning stage with high out-of-plane stiffness and compact size. The linear guide compliant mechanism of the stage takes spatial leaf spring parallelograms as the basic units, which are serially connected to obtain large travel, high out-of-plane stiffness, and compact size si… Show more
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