Design and simulation of a novel metallic microgripper using vibration to release nano objects actively

Demaghsi, Hamed; Mirzajani, Hadi; Ghavifekr, Habib Badri

doi:10.1007/s00542-013-1888-7

Cited by 28 publications

(8 citation statements)

References 10 publications

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“…The forward movement of the shaft opens the gripper by rotation of the arms. Several studies demonstrated structures fabricated from nickel [69], silicon [73], polymer [74], and also a normally-open microgripper structure [75]. Other examples can use complex compliant structures to operate the gripper arms.…”

Section: V-shape Chevron Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Section: V-shape Chevron Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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“…However, ETA's working principle governs that it has some problems like low frequency, high power consumption and nonlinear movement [41,42]. Nevertheless, the high operating temperature may have a great impact on the ambient environment and operated target [43][44][45].…”

Section: Electrothermal Actuatormentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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“…In the present investigation, an approach based on MEMS Technology has been used and described. Then, testing, as the necessary natural stage of validation [ 18 , 19 ], has been carried out on the new microsystems, and finally, a simulation has been built, as a means to optimize the experimental campaigns and to decrease the number of experiments [ 20 , 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper

et al. 2021

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This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. In fact, the adoption of multiple CSFHs gives rise to the possibility of embedding quite a complex mechanical structure and, therefore, increasing the number of design parameters. For the case under study, a double four-bar linkage in a mirroring configuration was adopted. The presented microgripper has been fabricated by using a hard metal mask on a Silicon-on-Insulator (SOI) wafer, subject to DRIE (Deep Reactive Ion Etching) process, with a vapor releasing final stage. Some prototypes have been obtained and then tested in a lab. Finally, the experimental results have been used in order to assess simulation tools that can be used to minimize the amount of expensive equipment in operational environments.

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Design and simulation of a novel metallic microgripper using vibration to release nano objects actively

Cited by 28 publications

References 10 publications

Review of Electrothermal Actuators and Applications

Review of Electrothermal Actuators and Applications

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper

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