Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Wu, Zeyi; Xu, Qingsong

doi:10.3390/act7010005

Cited by 69 publications

(28 citation statements)

References 131 publications

(127 reference statements)

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“…In this paper, the benefit attribute was used for analysis and the entropy method was applied to specify the attribute weight by using equations ( 10 21) and ( 22) are used to determine the positive and negative ideal solutions. Then the nearest alternative ranges from PIS and the farthest alternative range from NIS were computed by equations (23) and (24). The nearest coefficient is calculated by using equation (24).…”

Section: Combine Gts-topsismentioning

confidence: 99%

“…Then the nearest alternative ranges from PIS and the farthest alternative range from NIS were computed by equations (23) and (24). The nearest coefficient is calculated by using equation (24). Finally, alternatives according to the value of 𝐶 𝑖 was selected.…”

Section: Combine Gts-topsismentioning

confidence: 99%

“…The sliding-mode control methodology was applied for piezoelectric drive, which overcomes the problem of parameters including effects of hysteresis and disturbance in piezoelectric drive systems without compensation (Liaw et al 2008) [19]. Multi-layer piezoelectric materials were proposed for a large displacement and high force to expand its application possibilities (Yang and Xu 2017 The International Journal of Advanced Manufacturing Technology [23]; Wu and Xu 2018 [24]). Nachippan et al (2018) [9] application model of piezoelectric microgripper for unmanned aircraft was also considered, analysis of the arbitrary variable structure of microgripper was performed and COMSOL MULTIPHYSICS 4.2 software was used for piezoelectric analysis.…”

Section: Introductionmentioning

confidence: 99%

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Optimization Parameter for Micro-Gripper Based on Triple-Stair Compliant Mechanism Using GTs-TOPSIS

Wang

2021

Preprint

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In manipulating the assembly of micro-components, the symmetrical microgripper mechanism often causes destruction, damaging the micro-components during manipulation. The reason is due to the phenomenon of non-uniform clamping force output of the clamp. From this disadvantage, a new asymmetric microgripper structure is proposed with stable output clamping force. The asymmetric microgripper structure will have a smaller output displacement than the symmetric structure. Therefore, to increase the output displacement gain, a flexible hinge with a triple stair half bridge-style mechanism is adopted to design the amplifier of the asymmetrical microgripper. The finite element method is applied to analyze the displacement and stress. The optimization process is performed based on the geometric parametric properties of the structure. Using the technology for order preference by similarity to ideal solution (TOPSIS) based on the grey relationship analysis (GRA) obtained the maximal displacement output and minimal stress. The results show that the maximum output displacement is 5,818 mm, stress after analysis is 2,432MPa. The test is conducted to verify the optimal results and the effectiveness of the optimization method. Finally, experimental experiments were performed, with a 4.8% difference from the FEA results. The results from the experimental test verify that the microgripper's maximum displacement amplification ratio is approximately 58.2 times.

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Section: Combine Gts-topsismentioning

confidence: 99%

Section: Combine Gts-topsismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Optimization Parameter for Micro-Gripper Based on Triple-Stair Compliant Mechanism Using GTs-TOPSIS

Wang

2021

Preprint

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“…On the contrary, the compliant mechanisms with the advantages of no friction, no clearance, and high precision have become a research focus in the field of micro-nano operations in the past few years [14,15]. In micro-nano operations, electromagnetic actuators, electrostatic actuators, electrothermal actuators, and piezoelectric ceramic actuators are usually used to drive the platforms [16]. As one kind of the most popular actuators, piezoelectric ceramic actuators are widely used in precision platforms for their merits of high resolution, fast response speed, and large driving force [17,18].…”

Section: Introductionmentioning

confidence: 99%

Design of a 3DOF XYZ Bi-Directional Motion Platform Based on Z-Shaped Flexure Hinges

Gan

Long

2021

Micromachines

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This paper presents a design of a 3DOF XYZ bi-directional motion platform based on Z-shaped flexure hinges. In the presented platform, bridge-type mechanisms and Z-shaped flexure hinges are adopted to amplify its output displacement. Bi-direction motion along the X-axis and Y-axis follows the famous differential moving principle DMP, and the bi-directional motion along the Z-axis is realized by using the reverse arrangement of the Z-shaped flexure hinges along the X-axis and Y-axis. Statics analysis of the proposed platform is carried out by the energy method, compliance matrix method, and force balance principle. Meanwhile, the Lagrange method is used to analyze the dynamics of the platform. A series of simulations are conducted to demonstrate the effectiveness of the proposed design. The simulation results show that the average displacements of the platform in the XYZ-axis are ±125.58 μm, ±126.37 μm and ±568.45 μm, respectively.

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“…Common electrostatic actuators usually require a large driving voltage to achieve a desired output displacement. However, a large driving voltage will tend to cause electrostatic breakdown, affecting reliability [6]. Thus, PEAs and VCMs have typically been adopted to actuate compliant micro/nano positioning stages [7,8,9,10,11].…”

Section: Introductionmentioning

confidence: 99%

Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage

et al. 2019

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A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.

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Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Cited by 69 publications

References 131 publications

Optimization Parameter for Micro-Gripper Based on Triple-Stair Compliant Mechanism Using GTs-TOPSIS

Optimization Parameter for Micro-Gripper Based on Triple-Stair Compliant Mechanism Using GTs-TOPSIS

Design of a 3DOF XYZ Bi-Directional Motion Platform Based on Z-Shaped Flexure Hinges

Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage

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