Design and fabrication technologies for ultraviolet replicated micro-optics

Rudmann, Hartmut; Rossi, Markus

doi:10.1117/1.1803554

Cited by 12 publications

(4 citation statements)

References 14 publications

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“…NIL is currently being used in research to imprint many applications. These can be grouped into the following: Recently researched applications include diffractive optical structures [18], Bragg gratings [19], waveguides [20], waveplates [21], polarizers [22], photonic crystals [23], surface acoustic wave (SAW) devices [24], organic light emitting diodes (OLEDs) [25], organic thin film transistors (OTFTs) [26], MOSFETs [27,28], capacitance comb drives [29], cantilever arrays [30], DNA sequencing [31], microfluidic channels [32], patterned magnetic media [33], cross-bar circuits [34] and static random access memory (SRAM) [35].…”

Section: Current Research Applicationsmentioning

confidence: 99%

An assessment of the process capabilities of nanoimprint lithography

Balla

Spearing

Monk³

2008

J. Phys. D: Appl. Phys.

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Nanoimprint lithography (NIL) is an emerging nanofabrication tool, able to replicate imprint patterns quickly and at high volumes. The present study was performed in order to define the capabilities of NIL, based on a study of published research and to identify the application areas where NIL has the greatest potential. The process attributes of different NIL process chains were analysed, and their process capabilities were compared to identify trends and process limitations. The attributes chosen include the line width, relief height, initial resist thickness, residual layer thickness, imprint area and line width tolerances. In each case well-defined limits can be identified, which are a direct result of the mechanisms involved in the NIL process. These quantitative results were compared with the assessments of individuals in academia and within the microfabrication industry. The results suggest NIL is most suited to producing photonic, microfluidic and patterned media applications, with photonic applications the closest to market. NIL needs to address overlay alignment issues for wider use, while an analysis is needed for each market, as to whether NIL adds value.

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Section: Current Research Applicationsmentioning

confidence: 99%

An assessment of the process capabilities of nanoimprint lithography

Balla

Spearing

Monk³

2008

J. Phys. D: Appl. Phys.

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“…One of the targets in optical designing is to realize a compact, simple and inexpensive device for the imaging. Although small, low-cost and high-performance lenses are now available, [1][2][3] other techniques named coded aperture method, lensless imaging, and their related technologies have been demonstrated. Those technologies are expected to give us less cost and thinner optical devices and additional functions such as refocusing, depth sensing, and so on.…”

Section: Introductionmentioning

confidence: 99%

Image focusing analysis using coded aperture made of a printed mask

Saito¹,

Saito²

2019

Jpn. J. Appl. Phys.

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We proposed a method to extract images on arbitrary focal positions from a picture taken with a coded aperture camera system. The aperture is a simple and randomly blocked square grid that can be made by an ordinary ink-jet printer, which is placed nearby the pupil of the imaging optics. We used a lens to reduce the image of the printed mask in order to fit the resolution of the image sensor. However, this technique does not Require a high accuracy lens system. The point spread functions (PSFs) are measured as the images of an artificial point light source located at the object planes required. The inverse filters calculated with the PSFs are applied to the observed image, and then we obtained the corresponding refocused scenes. The PSFs have random patterns of different size so that the correlation among them are suppressed. As the result, the refocused images are separated well. We also calculated the PSFs, the projected and refocused images from the parameters of the experimental setup. The estimated images are in good agreement with the experimental results.

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“…Refractive microlens arrays (MLAs) are crucial in enabling applications such as collimators, optical interconnects, microfluidic sensors or diffusers . Lately, MLAs are finding applications in high volume market such as hand‐held consumer electronics, LED back lighting, light extraction in displays and in automotive industry for head‐up displays . The key driving forces for embracing micro‐optical devices are miniaturization and cost effectiveness.…”

Section: Introductionmentioning

confidence: 99%