Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

Tian, Yanling; Shirinzadeh, Bijan; Zhang, D.

doi:10.1016/j.mee.2009.08.001

Cited by 193 publications

(92 citation statements)

References 42 publications

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“…the number of actuation is the same as the number of DOF [17,114,[161][162][163][164][165][166][167], and over-actuated systems, i.e. the number of actuation is the more than the number of DOF [20,112].…”

Section: Modeling and Control Ofmentioning

confidence: 99%

A Survey of Modeling and Control of Piezoelectric Actuators

Peng¹,

Xiongbiao²

2013

MME

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Piezoelectric actuators (PEAs) have been widely used in micro-and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis, and creep, are examined; and the issues involved are identified. In the control of PEAs as applied to positioning, a review of various control schemes of both model-based and non-model-based is presented along with their limitations. The challenges associated with the control problem are also discussed. This paper is concluded with the emerging issues identified in modeling and control of PEAs for future research.

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Section: Modeling and Control Ofmentioning

confidence: 99%

A Survey of Modeling and Control of Piezoelectric Actuators

Peng¹,

Xiongbiao²

2013

MME

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“…In order to implement the positioning and orientation of the sample for the precision measurement and characterisation, it is necessary to develop a 3-DOF positioning stage which can be utilized to conduct the in-plane motion. Tian et al have designed a 3-DOF flexure-based mechanism for micro/nano manipulation [21]. In order to improve the stiffness of the moving platform, a monolithic flexure-based 3-RRR parallel mechanism is utilized to implement planar motions.…”

Section: Introductionmentioning

confidence: 99%

Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

Cai

Tian

Wang

et al. 2016

Robotics and Computer-Integrated Manufacturing

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full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription. proposed to eliminate the nonlinear hysteresis, the trajectory tracking performances and to reduce external disturbance of the 3-DOF stage.

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“…Thus, 3-DOF planar micro/nano positioning mechanisms should be developed to fulfill the demands. A number of flexure-based parallel mechanisms have been developed to implement micro/nano manipulation [15][16][17][18]. To enlarge the workspace of the developed flexure-based mechanisms, a lever mechanism is generally utilized to amplify the output displacement of the piezoelectric actuator.…”

Section: Introductionmentioning

confidence: 99%

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Guo

Tian

Liu

et al. 2015

Robotics and Computer-Integrated Manufacturing

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2015)Design and control methodology of a 3-DOF flexure-based mechanism for micro/nanopositioning. Copies of full items can be used for personal research or study, educational, or not-forprofit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way.

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Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

Cited by 193 publications

References 42 publications

A Survey of Modeling and Control of Piezoelectric Actuators

A Survey of Modeling and Control of Piezoelectric Actuators

Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

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