2004
DOI: 10.1016/j.mejo.2003.09.017
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Design and development of high-frequency thermoacoustic engines for thermal management in microelectronics

Abstract: Thermoacoustic heat engines provide a practical solution to the problem of heat management in microcircuits where they can be used to pump heat or produce spot cooling of specific circuit elements. There are basically two types of thermoacoustic engines, a prime mover where heat is converted to acoustic energy, and a heat pump or cooler where sound can pump heat up a temperature gradient. Such devices are relatively simple, they can be efficient, and they are readily adaptable to microcircuit interfacing. Sinc… Show more

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Cited by 90 publications
(32 citation statements)
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(22 reference statements)
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“…To such a situation, suppressing mean-flow buckling but keeping thermoacoustic instability is a remedy. The control of mean-flow buckling was usually through passive approaches, such as re-shaping the chambers [11][12][13][14], changing the working gas [15], re-designing the heat regeneration [16][17][18][19][20][21][22], etc., based on the analysis of computation fluid dynamics as in [11,23,24] for example. As indicated in the literature of combustion instabilities [25][26][27][28], suppression of mean-flow buckling is usually accompanied by reduction of acoustic motions.…”
Section: Open Accessmentioning
confidence: 99%
“…To such a situation, suppressing mean-flow buckling but keeping thermoacoustic instability is a remedy. The control of mean-flow buckling was usually through passive approaches, such as re-shaping the chambers [11][12][13][14], changing the working gas [15], re-designing the heat regeneration [16][17][18][19][20][21][22], etc., based on the analysis of computation fluid dynamics as in [11,23,24] for example. As indicated in the literature of combustion instabilities [25][26][27][28], suppression of mean-flow buckling is usually accompanied by reduction of acoustic motions.…”
Section: Open Accessmentioning
confidence: 99%
“…When gate is defined as a MOSFET, a Ni layer is layered on top of the sub-layer. The first thermal process, usually RTP, 5 at the low temperatures (often between 260 and 310°C) leads to the formation of Ni 2 Si in gate, source/drain areas where Si, which is in direct contact with layered Ni, is formed. No interaction happens between Ni and the surrounding oxide environment.…”
Section: Salicide Processmentioning
confidence: 99%
“…Besides their many advantages, which include no mechanical moving parts and environmentally friendly working fluids, thermoacoustic engines (TAE) are promising technologies for reusing waste heat, providing refrigeration or for producing micro-cooling devices [3].…”
Section: Introductionmentioning
confidence: 99%