Design and analysis of micro-optic-electro-mechanical accelerometer

In this paper, we propose a closed loop Micro-Opto-Electro-Mechanical (MOEM) accelerometer employing a nonuniform cantilever beam and an Anti Resonant Reflecting Optical Waveguide (ARROW) on silicon. The MOEM acelerometer consists of a Mach Zehnder Intereferometer (MZI) and an electro-elasto-optic phase modulator to nullify the acceleration induced phase change so as to make the device work in closed loop form. It is shown that MOEM accelerometers with noise equivalent acceleration of 0.255 µ g/ √ Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/ o C and shock survivability of more than 1000 g is feasible.

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“…To get high sensitivity, the interferometer to be biased about operating point with a non zero response slope 8,9 P (∆φ a )…”

Section: Signal Processing Schemesmentioning

confidence: 99%

Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation

et al. 2005

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“…refractive index n is function of two variables given as n(x, z). We start from basic equation [3] given by: which can also be stated as a second order partial differential equation ( since there are two variables) as:…”

Section: Non Uniform Waveguidementioning

confidence: 99%

Optimization of Non-Uniform Optical Waveguide in MOEMS Accelerometer

Shanbag

Venkatesh

Varsha

et al. 2011

AMM

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Miniaturization is the rule of the day. This has even extended to optical domain where entire sensor arrays complete with laser or led source and pin photodiode are fabricated within a single chip. The device discussed and analyzed in this paper is a MOEMS accelerometer which consists of uniform micro cantilever on one arm of MZI structure. The refractive index is assumed to vary even along the direction of pulse propagation along with the frequently analyzed refractive index profile perpendicular to the light pulse path. The efficiency of device is increased by numerous optimization measures. A dual approach of optimal curved waveguide with increased difference is found to maximize power in waveguide core with minimal leakage to the cladding. This effectively translates to increased sensitivity as greater power is available for accurate detection process. The analysis is supported by appropriate simulations.

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“…In this case microscale devices which use light for controlling and efficiently analyzing fluids or colloidal solutions and solids in fluids. Sensors are fundamental elements optofluidics [1]. Most of the optical sensors developed so far are based on different mechanisms like measurement of change in refractive index at the surface of the sensor, surface plasmon resonance and other methods which need large area beams and a relatively large area.…”

Section: Introductionmentioning

confidence: 99%