Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation

Abstract

In this paper, we propose a closed loop Micro-Opto-Electro-Mechanical (MOEM) accelerometer employing a nonuniform cantilever beam and an Anti Resonant Reflecting Optical Waveguide (ARROW) on silicon. The MOEM acelerometer consists of a Mach Zehnder Intereferometer (MZI) and an electro-elasto-optic phase modulator to nullify the acceleration induced phase change so as to make the device work in closed loop form. It is shown that MOEM accelerometers with noise equivalent acceleration of 0.255 µ g/ √ Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/ o C and shock survivability of more than 1000 g is feasible.