Design and Analysis of a MEMS Tunable Inductor Based on UV Lithography of SU-8

Abstract

This paper reports the design of a tunable radio-frequency (RF) inductor and analyses the parameters that influence the quality factor (Q) of the inductor. In our paper we mainly discuss the influence of the thickness of the metal layer on the Q when other parameters are fixed. In order to achieve the high thickness, we use SU-8 as our photoresist instead of the traditional photoresist. Through the analysis, we calculate out the thickness of the metal layer is 23um when the Q reaches to maximum.

A Inductive Accelerator Based on UV Lithography of SU-8

“…4 shows the relationship between f and F. In our design, the pitch of the capacitance is determined as 2um, the length and width of the polar plates are 30um and 13um respectively. Thus, by the formula (8), we can obtain the capacitance value is 1.73*10 -15 F. From Figure 4, we can see when F = 100N, the inductance value is 1.8*10 -9 H. Calculated by formula (7), we know the frequency is 9 * 10 10 HZ. With this value, we can roughly know the basic information of the differential frequency circuit.…”