A Inductive Accelerator Based on UV Lithography of SU-8

Abstract

This paper describes a novel inductive accelerator and investigates some of the parameters affecting its performance. As a important component of the accelerator, the resonator is composed of a new-style tunable inductor and a fixed capacitor. When an acceleration is applied on the resonator in the vertical direction, we can acquire the acceleration value by measuring the changes of the resonant frequency passing through a differential frequency circuit. Design and simulation, we get out the frequency of the accelerator is proportional to the acceleration, inductance variation ranges from 0 to 0.2*10-9H, and frequency variation is from 0 to 5.7*109HZ when the capacitor spacing is 2um. We use SU-8 photoresist to fabricate thick metal layer.