Deposition of TiO2 Multilayer Thin Films Doped with Cobalt and Studying the Effect of Annealing Temperatures and Number of Layers on the Structural and Morphological of Thin Films

Mozaffari, Niloofar; Elahi, Seyed Mohammad; Parhizgar, Sara Sadat

doi:10.1007/s10765-019-2533-1

Cited by 6 publications

(3 citation statements)

References 63 publications

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“…Titanium dioxide thin films have several remarkable properties, including a low-loss tangent, antibacterial activity, super hydrophilicity, ferromagnetism, non-toxicity, and excellent chemical and mechanical stability (corrosive-protective) [7,9,[18][19][20][21].…”

Section: Receivedmentioning

confidence: 99%

Investigation of optical and electrical properties of TiO₂, SiO₂, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Entezarmahdi,

Sedghi

2024

Phys. Scr.

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In this work, spectroscopic ellipsometry was used to study the optical and electrical properties of TiO2 and SiO2 thin films deposited by spin-coating at different coating rotation speeds and annealed at various temperatures. In addition, Ag thin films of different thicknesses were deposited by DC magnetron sputtering at ambient temperature. In this method, the optical band gap for TiO2 thin films is between 2.4-3.25 eV, and for SiO2 thin films, it is between 3.2-3.6 eV.The optical properties, including reflectance, transmittance, and absorbance, of TiO2, SiO2, and Ag thin films in the form of single and multilayer thin films in the wavelength range of 200-2500 nm, were investigated using an ultraviolet-visible-near infrared (UV-Vis-NIR) dual-beam spectrophotometer. In the TiO2/Ag/SiO2 multilayer thin film, the rejection was 58.6% -73.6% in the NIR wavelength range (800-2500 nm), and a transmittance of 40%-45% was achieved in the visible light range (400-700 nm).

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Section: Receivedmentioning

confidence: 99%

Investigation of optical and electrical properties of TiO₂, SiO₂, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Entezarmahdi,

Sedghi

2024

Phys. Scr.

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“…reveals the weight and atomic percentages of ingredients extracted from EDX patterns of the adsorbent including Al, O, Pd as well as N and Si at 32.57, 55.16, 1.57, 4.10, 7.59 wt% for each element. In addition, Ca peak corresponded to glass substrates[42].…”

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confidence: 94%

Investigation of carbon monoxide gas adsorption on the Al2O3/Pd(NO3)2/zeolite composite film

et al. 2019

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In this study, Al 2 O 3 /Pd(NO 3) 2 /zeolite composite films have been fabricated by roll coating method and characterized by X-ray diffraction, energy-dispersive X-ray spectroscopy and field emission scanning electron microscopy. The gas adsorption was tested in an experimental setup by a continuous gas analyzer KIMO KIGAZ 210 at constant temperature and pressure (32 °C and 1.5 bar) and as a function of reaction time (s). The inlet CO gas concentration was 150 mg L −1 , and the saturation level of CO gas concentration was 5 mg L −1. The maximum adsorption capacity (q max) and maximum adsorption efficiency (%) were calculated as 111.16 mg g −1 and 97%, respectively. Pseudo-first-order, pseudo-second-order, and intra-particle diffusion models were investigated to kinetic study of CO adsorption on Al 2 O 3 /Pd(NO 3) 2 /zeolite adsorbents. Results indicated that CO adsorption follows the pseudo-second-order model well according to regression coefficient value (R 2 = 0.98), and the value of pseudo-second-order rate constant of adsorption was obtained as 2 × 10 −5 g mg −1 s −1. According to the intra-particle diffusion model, adsorption is affected by only one process. So, adsorption of CO by Al 2 O 3 /Pd(NO 3) 2 /zeolite adsorbent indicated an effective adsorption by obtained results.

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“…The active surface area of films, diffusion process and matrix solubility are directly related to gas adsorption performance [18][19][20][21]. For Zirconium alloy getters, adding cobalt can enlarge the lattice parameter then increase gas diffusion speed, meanwhile, rare earth elements can deplete vacancy near Zr from oxygen or hydrogen to enhance getter activity [16,[22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Influence of the sputtering glancing angle on the microstructure and adsorption characteristics of Zr-Co-RE getter films

Zhou¹,

Zhou²,

Liu³

et al. 2020

Mater. Res. Express

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Zr-Co-RE non-evaporable getter films have excellent gas adsorption performance therefore can be used in vacuum sealed electronic devices. The microstructure of getter films has vital effect on adsorption performance. In this paper, Zr-Co-RE films deposited by DC magnetron sputtering at different glancing angles are investigated including microstructures and adsorption characteristics. The surface and cross-sectional morphologies demonstrate loose, porous and columnar-like structure which forms because of low lateral mobility of Zr and Co atoms and shadowing effect of nonperpendicular sputtering. Zr-Co-RE films are amorphous or nanocrystalline structure. The films deposited at 90°glancing angle show large grain size. After Zr-Co-RE films are heated at 350°C for 15 min, the H 2 adsorption capacity and pumping speed at ambient temperature are tested. The films grown at 90°glancing angle have highest initial pumping speed (103.9 ml s −1 cm −2 ), which owe to its more gas diffusion path and active surface, meanwhile, the adsorption capacity is lower than 60°b ecause of difficult and limited diffusion process into getter matrix. The films grown at 60°glancing angle have best adsorption capacity (71.5 Pa.ml cm −2 ) and pumping speed stability. ORCID iDsDetian Li https:/ /orcid.org/0000-0001-6842-6217

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Deposition of TiO2 Multilayer Thin Films Doped with Cobalt and Studying the Effect of Annealing Temperatures and Number of Layers on the Structural and Morphological of Thin Films

Cited by 6 publications

References 63 publications

Investigation of optical and electrical properties of TiO₂, SiO₂, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Investigation of optical and electrical properties of TiO₂, SiO₂, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Investigation of carbon monoxide gas adsorption on the Al2O3/Pd(NO3)2/zeolite composite film

Influence of the sputtering glancing angle on the microstructure and adsorption characteristics of Zr-Co-RE getter films

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Deposition of TiO2 Multilayer Thin Films Doped with Cobalt and Studying the Effect of Annealing Temperatures and Number of Layers on the Structural and Morphological of Thin Films

Cited by 6 publications

References 63 publications

Investigation of optical and electrical properties of TiO2, SiO2, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Investigation of optical and electrical properties of TiO2, SiO2, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Investigation of carbon monoxide gas adsorption on the Al2O3/Pd(NO3)2/zeolite composite film

Influence of the sputtering glancing angle on the microstructure and adsorption characteristics of Zr-Co-RE getter films

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Investigation of optical and electrical properties of TiO₂, SiO₂, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering

Investigation of optical and electrical properties of TiO₂, SiO₂, and Ag single and multilayer thin films using spectroscopic ellipsometry and spectrophotometry methods: prepared by spin coating and DC magnetron sputtering