Demonstration of in-situ dielectric permittivity measurement using precision probing technique

Hirano

Horibe

2021

Jpn. J. Appl. Phys.

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In this study, we demonstrate the temperature dependence of the dielectric properties of Al 2 O 3 and Ba 2 Ti 9 O 20 ceramics, using a probe-backside reflection (PBR) method, at frequencies range up to 320 GHz. The impact of transmission loss on the dielectric properties was first eliminated from the measured S-parameter values using the original S-parameter values of a transmission line. Although the temperature coefficient of dielectric permittivity was uncertain owing to limitations in the measurement repeatability of the PBR method, those of loss tangents of Al 2 O 3 and Ba 2 Ti 9 O 20 ceramics were calculated as 2.8 × 10 −5 K −1 and 1.1 × 10 −4 K −1 , respectively, for frequencies up to 125 GHz. Furthermore, the temperature coefficient of the dielectric permittivity of Al 2 O 3 was calculated as 691 ppm K −1 at 255 GHz, while those of the dielectric loss tangent at 235 GHz and 275 GHz was calculated as 1.2 × 10 −5 K −1 and 1.5 × 10 −5 K −1 , respectively.

Section: The Pbr Methods With Compensation Of Transmission Lossmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Evaluation of the temperature dependence of dielectric properties using probe-backside reflection method at millimeter-wave frequencies

Hirano

Horibe

2021

Jpn. J. Appl. Phys.

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“…1 shows the constructed on-wafer measurement system for measurement frequencies ranging from 190 GHz to 340 GHz. The system set up for the measurement frequencies up to 110 GHz is shown in [8,9]. Table II lists the information of the measurement systems and conditions.…”

Section: Measurement Instrumentsmentioning

confidence: 99%

“…The measurement system was calibrated by thru-reflect-line (TRL) calibration with the commercialized ISS which is indicated in the table. The radio frequency signal detection technique was used for the probing procedure [8,9].…”

Section: Measurement Instrumentsmentioning

confidence: 99%

Transmission loss of screen-printed metallization at millimeter-wave frequency

IEICE Electron. Express

Horibe

Yoshida

2019

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This paper is the first report on transmission loss of screenprinted metallization of transmission lines at frequencies ranging up to 340 GHz. We observed that the printed transmission lines exhibited significantly reduced transmission losses when compared to conventional lines on the commercialized impedance standard substrate (ISS). The conductivity of Ag metallization was considered the reason for this reduced loss. Though degradation of the loss was observed in transmission lines approximately 3 years post fabrication, the printed line retains a smaller loss than conventional lines on the ISS. Further, despite the printed line having inferior production reproducibility, the screen-printed technology was considered to be an improved solution for the fabrication of millimeter-wave circuits, even in the 300 GHz band.

“…On the other hand, the PBR method generates pseudoresonance by controlling the position of the hf probe in precision on a coplanar waveguide (CPW). [16][17][18][19][20][21] The PBR method can suppress the dimensional error of a resonator because it is determined by the accuracy of the probe position, which is generally smaller than the manufacturing error of the resonator. In addition, the author developed an original measurement technique for minimizing variation in probe position to less than 1 μm.…”

Section: Introductionmentioning

confidence: 99%

Study on measurement capability of probe-backside reflection method for evaluation of dielectric materials

2023

Jpn. J. Appl. Phys.

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This study clarifies the measurement capability of the probe-backside reflection (PBR) method for the evaluation of dielectric materials. Because the PBR method requires the preparation of a coplanar waveguide (CPW) on a material-under-test (MUT), the measurement capability is limited not only by the dielectric properties of the MUT but also by the limitations in the CPW design. In this study, the measurement capability of the PBR method was estimated to be limited up to 15 for the dielectric permittivity, and from 3 × 10-3 to 2 × 10-1 for the dielectric loss tangent, in the frequency range up to 300 GHz.