Study on measurement capability of probe-backside reflection method for evaluation of dielectric materials

Abstract

This study clarifies the measurement capability of the probe-backside reflection (PBR) method for the evaluation of dielectric materials. Because the PBR method requires the preparation of a coplanar waveguide (CPW) on a material-under-test (MUT), the measurement capability is limited not only by the dielectric properties of the MUT but also by the limitations in the CPW design. In this study, the measurement capability of the PBR method was estimated to be limited up to 15 for the dielectric permittivity, and from 3 × 10-3 to 2 × 10-1 for the dielectric loss tangent, in the frequency range up to 300 GHz.