Demonstration of dielectric measurement using a probe-backside reflection method up to 300 GHz

Abstract

This study demonstrates a novel low-loss dielectric measurement technique that utilizes reflections at the backside of a probe in the millimeterwave frequency range up to 300 GHz. The accuracy of measurement was investigated by evaluating the measurement uncertainty contributors individually. Further, the dielectric dispersion of alumina was calculated from a phonon model. The evaluated dielectric constant and dielectric loss tangent corresponded with values in the accuracy range generated by the phonon model, which was constructed from Fourier transform infrared spectroscopy (FT-IR). These results validated the accuracy of the proposed method in the millimeter-wave frequencies. The measurement technique is expected to be useful for the evaluation of dielectric properties of circuit substrates used in "Beyond 5G" communication technologies.

Study on measurement capability of probe-backside reflection method for evaluation of dielectric materials

“…It is noted that the PBR method is insensitive to differences in characteristic impedance (Z c ) from 50 Ω. 18) Though the S 21 trace becomes more rippling when Z c is far from the system impedance, which is 50 Ω, the impact of the rippled trace can be reduced by the compensation technique discussed in Ref. 20.…”

“…On the other hand, the PBR method generates pseudoresonance by controlling the position of the hf probe in precision on a coplanar waveguide (CPW). [16][17][18][19][20][21] The PBR method can suppress the dimensional error of a resonator because it is determined by the accuracy of the probe position, which is generally smaller than the manufacturing error of the resonator. In addition, the author developed an original measurement technique for minimizing variation in probe position to less than 1 μm.…”

Long-Term Stability Test on On-Wafer Measurement System in Frequency Ranges up to 325 GHz

“…A fully automatic probe station was constructed to apply the RSD technique. The details of the probe station have been published previously [22][23][24][25][26]. The measurements were conducted in two frequency bands, which ranged from 1 GHz to 110 GHz (100 GHz band) and from 220 GHz to 325 GHz (300 GHz band).…”

“…The developed probing system significantly improved the reproducibility of on-wafer measurements. The alignment technique has demonstrated that in the frequency range up to 340 GHz [24][25][26]. The RSD technique is expected to solve three of the abovementioned problems in the long-term stability test of on-wafer measurements because the contact position is defined at the actual contact point, which is not at the apex of the probe silhouette.…”

Dielectric response and polarization mechanism of alkali silicate glasses in gigahertz to terahertz frequency range

“…17 The complex permittivity in the gigahertz range is often measured using an electrical resonance technique that is applicable below 300 GHz. 18 By contrast, the complex permittivity in the terahertz range is usually estimated via infrared reflectance and transmittance 19 ; however, glasses are often opaque in the terahertz range, which prevents the transmittance from being accurately determined. Furthermore, the complex permittivity of amorphous materials has rarely been estimated by Kramers-Kronig transformation.…”