1998
DOI: 10.1109/68.726772
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Demonstration of a monolithic multichannel module for multi-Gb/s intra-MCM optical interconnects

Abstract: In this letter, we report on the demonstration of a 2.48-Gb/s multichannel optical data-link for intramultichip module interconnects. The optical module was fabricated in Poly MethylMethAcrylate (PMMA) by deep proton lithography and monolithically integrates micromirrors and cylindrical lenses. With the same technology, we have also fabricated a singlechannel optical bridge and used this component to demonstrate a proof-of-principle optical intrachip interconnect by establishing a digital data-link between opt… Show more

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Cited by 15 publications
(7 citation statements)
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References 6 publications
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“…A second part integrates the counterpart mounting features and two micromirrors at a right angle to fold the 8 mm long light path over 180° (Figures 11a and 11b). We have already reported on the design, tolerance analysis [29,30], the rapid prototyping with deep proton lithography in Poly MethylMetAcrylate (PMMA) [21] of such an optical bridge for intra-chip interconnects [28,31], the opportunities for mass-replication through injection molding, and we have demonstrated its operation at 622Mbits/s [28] and at 2.48-Gb/s per channel [32]. This scalable 'optical bridge' concept allows for an increase in channel densities by using smaller lens diameters.…”
Section: Design Of a Free-space Micro-optical Bridge For In-plane Intmentioning
confidence: 99%
“…A second part integrates the counterpart mounting features and two micromirrors at a right angle to fold the 8 mm long light path over 180° (Figures 11a and 11b). We have already reported on the design, tolerance analysis [29,30], the rapid prototyping with deep proton lithography in Poly MethylMetAcrylate (PMMA) [21] of such an optical bridge for intra-chip interconnects [28,31], the opportunities for mass-replication through injection molding, and we have demonstrated its operation at 622Mbits/s [28] and at 2.48-Gb/s per channel [32]. This scalable 'optical bridge' concept allows for an increase in channel densities by using smaller lens diameters.…”
Section: Design Of a Free-space Micro-optical Bridge For In-plane Intmentioning
confidence: 99%
“…The guided-wave approach uses fibers or fiber bundles to confine the photons and guide them over several tens of centimeters 13,14,15 . Free-space optical interconnects use macro-optics 16,17,18,19 , micro-optics 20,21,22 or planar optics 23 to shape and direct the light beams from transmitter to detector. Most of the implementations follow a guidedwave approach but we chose for micro-optics to implement a free-space link between an array of transmitters and an array of receivers.…”
Section: The Micro-optical Pathway Blockmentioning
confidence: 99%
“…Similarly, for the implementation of chip-to-chip level interconnections, the integration of free-space optical systems is one of the most important tasks [36]. Here, due to the high interconnection densities, waveguide optical approaches are not feasible.…”
Section: Board-to-board and Chip-to-chip Interconnectsmentioning
confidence: 99%