2001
DOI: 10.1016/s0168-583x(00)00557-7
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Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

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Cited by 12 publications
(6 citation statements)
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“…Likewise, the [O]/[C] and [N]/[C] atomic ratios on the particle surface decreased from 0.21 to 0.10 and from 0.07 to 0.01 for the polyimide film, respectively. Therefore, nitrogen atoms can be released more easily than oxygen atoms, contrary to the case of thermal carbonization [9,10].…”
Section: Resultsmentioning
confidence: 99%
“…Likewise, the [O]/[C] and [N]/[C] atomic ratios on the particle surface decreased from 0.21 to 0.10 and from 0.07 to 0.01 for the polyimide film, respectively. Therefore, nitrogen atoms can be released more easily than oxygen atoms, contrary to the case of thermal carbonization [9,10].…”
Section: Resultsmentioning
confidence: 99%
“…The energy lost by the ion per unit path length, dE/dR, is related to the nuclear stopping power, S n (E), by the relationship: 8 where D is the atomic density of the target. The energy spectra were transformed into the depth profiles using the stopping powers calculated with the simulation from the SRIM.…”
Section: Resultsmentioning
confidence: 99%
“…In the case of the PI film the carbonization effect was observed, which makes these results consistent and extendable to all polymeric film. 6,8 The XPS spectra were analyzed into the component peaks. The XPS results after peak analysis of the untreated PI film are shown in Figure 4.…”
Section: Resultsmentioning
confidence: 99%
“…When the PI films were irradiated with Si ions, chain scis-026101-2 sion occurs and some volatile degradation products, mostly low mass, hydrogen, nitrogen and oxygen rich molecules, escape from the PI films. [12] Thus the contents of O and N decrease significantly from the result of RBS. Because the variation of H content can not be observed by the method of RBS, we do not discuss it here.…”
mentioning
confidence: 94%