Deformable magnetic mirror for adaptive optics: first results

Cugat, Orphée; Mounaix, Patrick; Basrour, Skandar; Divoux, C.; Reyne, Gilbert

doi:10.1109/memsys.2000.838565

Cited by 8 publications

(3 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Dimensions of the individual conductors in the coils are shown in Figure 12. These dimensions are coincidentally almost identical to the conductor cross-section dimensions in [13]. As discussed in the previous section, the prototype stators were fabricated with evaporated metal, and therefore the thickness of the conductors was limited to 3 µm, which was verified by cross-section measurements.…”

Section: Resultssupporting

confidence: 57%

See 1 more Smart Citation

Mesoscale wide-bandwidth linear magnetic actuators : an LDRD final report.

Jones

2004

View full text Add to dashboard Cite

The author wishes to thank the following individuals for their contributions: • Rajen Chanchani (1745) for overseeing the implementation of the BCB/Cu HDI process at Sandia and the lithographic fabrication of the stator windings in this project. • Denise B. Webb (1745) for fabricating the wafers. • Donald Bethke (1745) for assisting with the wafer processing. • Cynthia D. Blain (2339) for soldering leads on to the wafer. • Michael P. Saavedra (14184) for cutting the permanent magnets on the micro-EDM machine. • Thomas K. Mayer (15252) for designing and fabricating the actuator test stand.

show abstract

Section: Resultssupporting

confidence: 57%

“…Single-layer planar spiral coils were stacked in [11] and [12] to form inductors. An actuator was formed from an array of lithographically-fabricated single-layer spiral coils in [13]. The array of coils faced an array of small permanent magnets glued to the backside of a deformable mirror.…”

Section: Literature Reviewmentioning

confidence: 99%

Mesoscale wide-bandwidth linear magnetic actuators : an LDRD final report.

Jones

2004

View full text Add to dashboard Cite

show abstract

“…Researchers have recently been active in developing actuators, which have sizes of ten micrometres to a few millimetres, for use in ultra-small devices [1][2][3][4]. With the reduction in device size, the output power from the microdevices diminishes.…”

Section: Introductionmentioning

confidence: 99%

Novel micro torque measurement method for microdevices

Ota

Ohara

Karata

et al. 2001

J. Micromech. Microeng.

View full text Add to dashboard Cite

A general purpose measurement system has been developed which can measure very low torques of the order of 10 −7 N m. The new method proposed here uses wind pressure to apply a load to a turbine attached to the output shaft of a device. It can therefore be used for all rotating microdevices. The use of wind pressure reduces the loss during measurements, and makes it possible to measure low levels of torque easily by simply attaching the turbine to the device. In the present study, the measurement principle of the new system has been verified. The static friction torque was measured by the traditional method of using a thread wound around the motor shaft in order to examine the validity of the proposed method, and a comparison of the two methods with the measured data is presented. In addition, a prototype micromotor, 1.6 mm in diameter, has been fabricated and used to demonstrate that the new system is able to measure torques of the order of 10 −7 N m while the motor is in operation.

show abstract