Novel micro torque measurement method for microdevices

Ota, Hitoshi; Ohara, Takao; Karata, Y; Nakasima, S; Takeda, Munehisa

doi:10.1088/0960-1317/11/5/324

Cited by 14 publications

(7 citation statements)

References 8 publications

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“…Other micro-torque sensors have been developed for characterizing micromotors [12], [13], [14], however, these devices were designed for continuously rotating motor shafts and are not easily adapted to measure body torques generated by flapping-wing microrobots.…”

Section: Introductionmentioning

confidence: 99%

An ultra-high precision, high bandwidth torque sensor for microrobotics applications

Finio¹,

Galloway²,

Wood³

2011

2011 IEEE/RSJ International Conference on Intelligent Robots and Systems

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Motivated by the need for torque sensing in the µNm range for experiments with insect-sized flapping-wing robots, we present the design, fabrication and testing of a custom single-axis torque sensor. The micorobots in question are too large for MEMS force/torque sensors used for smaller live insects such as fruit flies, but too small to produce torques within the dynamic range of commercially available force/torque sensors. Our sensor consists of laser-machined Invar sheets that are assembled into a three dimensional beam. A capacitive displacement sensor is used to measure displacement of a target plate when the beam rotates, and the output voltage is correlated to applied torque. Sensor bandwidth, range, and resolution are designed to match the criteria of the robotic fly experiments while remaining insensitive to off-axis loads. We present a final sensor design with a range of ±130µNm, a resolution of 4.5nNm, and bandwidth of 1kHz. I. INTRODUCTIONWithin the last decade, multiple biologically-inspired robots have been developed at the insect scale, much smaller than traditional macro-scale robots yet larger than truly microscopic technologies such as MEMS (for examples see [1], [2]). The unique scale and operating conditions of these robots mean commercially available experimental tools may not always be sufficient and thus custom designs are required. For example, the robotic fly presented in [1] required the development of a two-axis force sensor to empirically determine lift and drag forces generated by the flapping wings [3].More recent work on the robotic fly includes the use of asymmetric wing flapping motions to generate net body torques [4], where the magnitude of predicted torques is on the order of 1-10µNm. These values were obtained using a quasi-steady blade-element aerodynamic model [5] to predict aerodynamic forces and resulting body torques. To the authors' knowledge, even the most sensitive commercially available torque transducers fall short of the range, resolution and bandwidth demanded for microrobotic experiments. For instance, the Nano17 by ATI Industrial Automation (Apex, NC) offers a torque measurement capacity of 120mNm and a resolution near 16µNm, which is an order of magnitude too large for our application.There have been several published works on the development and manufacture of custom torque sensors for a variety

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Section: Introductionmentioning

confidence: 99%

An ultra-high precision, high bandwidth torque sensor for microrobotics applications

Finio¹,

Galloway²,

Wood³

2011

2011 IEEE/RSJ International Conference on Intelligent Robots and Systems

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“…Esta proposta se baseia no torque de frenagem resultante da queda de pressão numa microturbina acoplada ao eixo do micromotor sob teste (OTA et al, 2001). O princípio de medição é apresentado na Figura 4.…”

Section: Microturbinasunclassified

Padrão Primário para Baixo Torque e Esforços para Melhoria da sua Incerteza

Bitencourt

Weingaertner

Lepikson³

et al. 2010

P&P

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Este artigo apresenta a análise do estado da arte em padrões de torque. Foca-se no entendimento da dificuldade em realizar torque abaixo de 1 Nm com incertezas relativas na ordem 10-5. Este limite do estado da arte contrasta com a crescente demanda por miniaturização e suas implicações em calibração nesta faixa de medição. Por fim, apresentam-se as iniciativas de avançar o estado da arte em padrão primário de torque para esta faixa.

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“…Another kind of method is the noncontact method, in which there is no mechanical contact between the micromotor and the testing equipment. The interaction between them can be initiated by means of magnetic induction between two cores [7] or by air pressure [8], [9], and so on. Wu et al…”

Section: Introductionmentioning

confidence: 99%

A New Method to Measure the Output Torque for Micromotor

Zhang

Han

et al. 2015

IEEE Trans. Instrum. Meas.

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A noncontact measuring method has been proposed to measure the micronewton meter-order output microtorque of micromotors to overcome the problem of large measurement errors caused by temperature, vibration, friction, and the flow of air. Physical model of this method is built according to Newton's third law and the electromagnetic theory. To realize this method, an apparatus named noncontact microtorque measuring equipment is designed to measure the output torque of micronewton meter-order micromotors. This device is mainly composed of electromagnetic windings, control circuit, an electronic balance, and a photoelectric sensor. Working principle of this device is introduced and the measured precisions of rotating speed and microtorque of the device are also analyzed in detail. Finally, a microelectromechanical system fabricated planar dc micromotor is tested by this device. The analyzed precision of the microtorque is 0.01 µN · m, which is precise enough for the measurement. The tested result indicates this method is feasible to measure the micronewton meter-order output microtorque of the micromotor.Index Terms-Micromotors, noncontact measuring method, noncontact microtorque measuring equipment, output microtorque, photoelectric sensor.

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Novel micro torque measurement method for microdevices

Cited by 14 publications

References 8 publications

An ultra-high precision, high bandwidth torque sensor for microrobotics applications

An ultra-high precision, high bandwidth torque sensor for microrobotics applications

Padrão Primário para Baixo Torque e Esforços para Melhoria da sua Incerteza

A New Method to Measure the Output Torque for Micromotor

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