Deep Reactive Ion Etching

Laermer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai

doi:10.1016/b978-0-323-29965-7.00021-x

“…With no end-point detector for SiO 2 in the machine, the charged ions deflect at the insulator interface towards the silicon surface leading to a sideways etching. This phenomenon has been described by Laermer et al [28]. The SEM images demonstrate that the design can be fabricated with the above-described processing steps.…”

Section: µMsupporting

confidence: 67%

A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

Vyas¹,

Staaf²,

Rusu³

et al. 2018

Preprint

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This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

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“…With no end-point detector for SiO

in the machine, the charged ions deflect at the insulator interface towards the silicon surface leading to a sideways etching. This phenomenon has been described by Laermer et al [ 33 ]. The SEM images demonstrate that the design can be fabricated with the above-described processing steps.…”

Section: Fabricationsupporting

confidence: 60%

A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

Vyas

¹

,

Staaf

²

,

Rusu

³

et al. 2018

View full text Add to dashboard Cite

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

show abstract

“…This method combines physical and chemical effects to remove material from a surface [12]. Figure 2.2 shows the difference in behavior between FF NTs and their nanofiber counterparts when exposed to RIE; while the NTs could tolerate up to 20 s of ion bombardment, the nanofibers were etched very quickly.…”

Section: Stability Of Diphenylalanine Nanostructuresmentioning

confidence: 99%