Decreasing the optical path length in an optoelectronic module using silicon micromachining

Abstract

In order to decrease the optical path length of an optoelectronic module, two ways of achieving 45 • silicon mirrors with trenches defining the mirror size are presented: dicing, and dry etching. The dicing was performed with a Disco DAD 361 dicing machine. To define the dry etched trench UV-lithography on electrodeposited resist was used. The electrodeposition was performed using commercially available positive photoresist PEPR 2400 from Shipley Ltd.

Patterning and growth of carbon nanotubes on a highly structured 3D substrate surface

“…Note that existing photolithography cannot pattern the Ni catalyst at regions underneath the suspended microstructures [12][13][14][15][17][18][19][20][21][22][23][24][25][26]. In short, this study successfully employs the shadow mask as well as the thin film The CNTs grown in the present processes were characterized using field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM) and Raman spectroscopy.…”

“…The enlarged SEM micrograph in figure 3(d) clearly shows the CNTs at the edge of near 90 • sidewall. It is very challenging to deposit the Ni catalyst and then to grow the CNTs on the highly structured substrate surface with 90 • sidewalls using existing approaches [12][13][14][15][17][18][19][20][21][22][23][24][25][26].…”

“…The integration of suspended carbon nanotubes with MEMS devices has been successfully demonstrated [16]. In addition, various process technologies, such as modified spin coating [17], electrodeposition (ED) [18][19][20][21][22][23][24] and the spray coating technique [23][24][25][26], have been reported to implement MEMS devices on a highly structured 3D substrate surface. However, controlled fabrication of CNT structures on highly structured surfaces has so far remained a great challenge.…”

The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon

“…Taking into account that single mode fiber was used with NA = 0.12, which corresponds to a total dispersion of 13.78 • of beam output, the additional increase is attributed to scattering caused by surface waviness and microroughness. Scattering angle could be reduced further by reducing the optical path between the fiber and the mirror as proposed by Richard et al [16].…”