2009
DOI: 10.1088/0960-1317/19/10/105009
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Patterning and growth of carbon nanotubes on a highly structured 3D substrate surface

Abstract: This study demonstrates the patterning and growth of carbon nanotubes (CNTs) on a highly structured three-dimensional (3D) substrate surface and even underneath the suspended microstructure surface. Three key processes-plasma surface treatment, self-assembled monolayer (SAM) coating and contact displacement electroless (CDE) plating-are employed and integrated to implement the present concept. In application, the CNTs have been conformally grown and patterned on the highly structured 3D substrate surface conta… Show more

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Cited by 11 publications
(6 citation statements)
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References 32 publications
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“…This study extends the previous patterning 3D CNT process [26] and CNT-based flexible tactile sensor technology [22] to establish the fabrication processes illustrated in figure 3. Therefore, the patterned CNT sensing elements and metal routings can be implemented on the flexible-polymer substrate with tactile bump and further integrated with the FPC.…”
Section: Fabrication and Resultssupporting
confidence: 66%
“…This study extends the previous patterning 3D CNT process [26] and CNT-based flexible tactile sensor technology [22] to establish the fabrication processes illustrated in figure 3. Therefore, the patterned CNT sensing elements and metal routings can be implemented on the flexible-polymer substrate with tactile bump and further integrated with the FPC.…”
Section: Fabrication and Resultssupporting
confidence: 66%
“…Most of these studies have fabricated planar polymer nanocomposites as strain sensors. Although CNT can provide unique properties to a polymeric structure, it is still a challenge to integrate CNTs within the structure for further applications [54][55][56]. Furthermore, numerous polymer micromachining processes have been recently developed to implement polymer-based flexible sensors [57,58] Therefore, in this paper, nanocomposite ultrasensitive proximity sensor exhibits a simple flexible nanostructure compared with previous studies, but with complex microstructure in which CNTs are melt-mixed in the mold substrate thermoplastic polyurethane (TPU).…”
Section: Introductionmentioning
confidence: 96%
“…Different processes have been typically employed to fabricate CNT-polymer nanocomposites sensors, such as mechanical stirring, vacuum filtration, nanoimprint lithography and inkjet printing 55 ; however, shaping CNTs in an uniform line pattern as sensing elements are reported to be very complex by these methods 58,59 . Although CNT can provide unique properties to a polymeric structure, it is still a challenge to integrate CNTs within the structure for further applications [60][61][62] . Furthermore, numerous processes of polymer micromachining have been newly developed to employ in polymer-based flexible sensors 63,64 .…”
mentioning
confidence: 99%