CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Abstract

Tri-n butylphosphine silver(I) complexes were synthesized and characterized with respect to their suitability for the CVD of silver thin films. The volatility and thermal stability of these complexes were investigated using temperature-programmed and in-situ mass spectrometry (MS). Complexes with smaller carboxylate ligands showed superior long-term stability and had the advantage of evaporation without decomposition. Careful examination of the fragments detected during evaporation and in a CVD reactor allowed us to propose the gas-phase decomposition mechanisms of some potentially suitable silver precursors. Deposition experiments in a cold-wall CVD reactor using selected precursors resulted in smooth and conductive silver coatings.

Low-temperature thermolysis behavior of tetramethyl- and tetraethyldistibines

“…Our previous work demonstrated its usefulness for the systematic evaluation of new families of CVD precursors [20], for the identification of the occurring reaction pathways under near-CVD conditions and for the determination of their activation energies [21]. Both precursors investigated in this study are highly volatile at 18°C with partial pressures of 0.32 mbar for Sb 2 Me 4 and 0.8 ϫ 10 Ϫ3 mbar for Sb 2 Et 4 [11].…”

Metal-based Inkjet Inks for Printed Electronics

“…The synthesis of Cu(I) and Ag(I) metal organic complexes is commonly achieved by reacting a transition metal salt with the desired oxidation state with a combination of an anionic ligand and a -donor ligand in a one-pot reaction followed by purification [163][164][165][166][167][168][169][170][171][172][173][174][175][176][177][178]. Similarly, Cu(II) MC precursors are obtained in an analogous manner from Cu(II) salts [179][180][181][182].…”

Advances in the deposition chemistry of metal-containing thin films using gas phase processes

“…Ngo et al 18 found all the 17 investigated Ag(I) complexes inappropriate because of the ligands' dissociation. Haase et al 19 found only one out of 15 Ag(I) complexes potentially suitable for the CVD of silver using the thermolysis route.…”