Current-voltage characteristics of a gas field ion source with a supertip

Börret, Rainer; Böhringer, K. F.; Kalbitzer, S.

doi:10.1088/0022-3727/23/10/001

Cited by 24 publications

(17 citation statements)

References 19 publications

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“…Asperities can also be intentionally fabricated in a controlled fashion to produce a desired electric field configuration at the tip. ''Super tips'' 21,22 have been constructed by producing controlled asperities on the end of relatively blunt tips for use as electron and ion emitters with a reduced angular emission profile. While a very small asperity indicates a high curvature emitter, the electric field is suppressed at large polar angles by the proximity of a flat surface, and emission is restricted to a small range of polar angles at the apex of the asperity.…”

Section: B Alternate Tip Configurationsmentioning

confidence: 99%

Field emission characteristics of the scanning tunneling microscope for nanolithography

Mayer¹,

Adams²,

Marder³

1996

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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We present a systematic study of the performance of scanning tunneling microscope ͑STM͒-based, low energy electron beam lithography, using simulations of field emission from STM tips, emphasizing realistic conditions of tip geometry and operation. We calculate the potentials and electric field for a hemispherical model emitter in an axially symmetric system. Emission current density at the tip is calculated using the Fowler-Nordheim equation, and current density at the sample is obtained by calculating trajectories of emitted electrons. We characterize the beam diameter at the sample as a function of emitter radius, tip-sample bias, emission current, resist thickness, and tip work function. The beam diameter is primarily affected by the tip-sample gap, increasing at larger gaps, characteristic of high bias and large tip curvature. For optimal tip radius the beam diameter increases linearly with bias from approximately 2 nm at 5 V to 25 nm at 50 V. Beam diameter is nearly independent of emission current over the range 0.05-50 nA. Dielectric resist films cause an increase in beam diameter due to increased tip-substrate gap. Beam diameter is very sensitive to tip work function, increasing dramatically for low work function tips. Tips comprised of asperities on flat surfaces produce significantly smaller beams compared to ''standard'' tips of the same emitter radius. However, for low bias ͑Ͻ15 V͒ beam diameter becomes insensitive to tip geometry. We compare these simulations to selected experimental results to evaluate the limitations to performance and assess the feasibility of routine sub-10 nm structure fabrication using STM-based low energy electron beam lithography.

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Section: B Alternate Tip Configurationsmentioning

confidence: 99%

Field emission characteristics of the scanning tunneling microscope for nanolithography

Mayer¹,

Adams²,

Marder³

1996

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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show abstract

“…Nagaoka et al also fabricated a similar structure by applying a negative high electric field to a contaminated Wh111i tip. 5) There were also reports on the use of an ion back bombardment 6,7) or thermal field method [8][9][10] to obtain ultrasharp tips terminated with a few atoms. All of these methods require tedious procedures and high technical skills.…”

Section: Introductionmentioning

confidence: 99%

Noble Metal/W(111) Single-Atom Tips and Their Field Electron and Ion Emission Characteristics

Kuo

Hwang

et al. 2006

Jpn. J. Appl. Phys.

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We have developed a simple, reliable and reproducible method for preparing single-atom tips. With electrochemical techniques, a very small amount of a noble metal is plated on the surface of a clean Wh111i tip. Upon annealing the tip at an appropriate temperature in vacuum, a three-sided {211} pyramid with a single-atom sharpness is formed spontaneously at the tip apex by adsorbate-induced faceting. This tip is both thermally and chemically stable, and can be regenerated several ten times when accidentally damaged. We use a field ion microscope to examine the atomic structure of the tip apex layer by layer and characterize the corresponding electron emission in the field emission mode. Some properties of Ne þ ions emitted from a single-atom tip are also measured, indicating a high brightness and a small extension angle. Many desirable features make the single-atom tips very promising for future particle beam applications in nanoscience and nanotechnology.

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“…A supertip GFIS also uses a cold finger. Kalbitzer, 48, 50 Kalbitzer and Knoblauch, 49,51 Miller et al 52 Wilbertz et al, 53 Borret et al, 54 Jousten et al, 55 and Borret et al 56 and other researchers 57-59 have extensively studied supertip GFIS. According to Kalbitzer, supertip GFIS can have a reduced brightness as high as 3 · 10 11 A/m 2 Sr V. 50 This claim of superhigh reduced brightness is based upon an estimation of the virtual source size of the supertip by Miller and coworkers.…”

Section: Needle Type Gfismentioning

confidence: 99%

Quest for high brightness, monochromatic noble gas ion sources

Tondare

2005

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

110

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Focused ion beam (FIB) machines are key tools for state-of-the art sample preparation in electron microscopy, for characterization and repair in material sciences, for the semiconductor industry and for nanotechnology in general. Liquid-metal ion sources (LMIS) are widely used in FIB machines because they meet the minimum ion source requirements such as source brightness and reliability. However, in FIB machines, noble gas ion sources are favorable for sputtering, beam-induced etching and deposition, because the implanted ions do not change the electrical behavior of the substrate significantly. There are several efforts by various researchers to develop noble gas ion sources that can be used in FIB machines instead of LMIS. The gas ion sources could not meet the minimum ion source requirements. Therefore, LMIS are still a popular choice among FIB machine users. This review article takes a critical look at the reported efforts in the literature to develop noble gas ion sources for FIB machines.

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Current-voltage characteristics of a gas field ion source with a supertip

Cited by 24 publications

References 19 publications

Field emission characteristics of the scanning tunneling microscope for nanolithography

Field emission characteristics of the scanning tunneling microscope for nanolithography

Noble Metal/W(111) Single-Atom Tips and Their Field Electron and Ion Emission Characteristics

Quest for high brightness, monochromatic noble gas ion sources

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