This letter reports the field emission measurements from the nanotubes of aluminum nitride which were synthesized by gas phase condensation using the solid-vapor equilibria. A dc arc plasma reactor was used for producing the vapors of aluminum in a reactive nitrogen atmosphere. Nanoparticles and nanotubes of aluminum nitride were first characterized by transmission electron microscope and tube dimensions were found to be varying from 30 to 200 nm in diameter and 500 to 700 nm in length. These tubes were mixed with nanoparticles of size range between 5 and 200 nm in diameter. Tungsten tips coated with these nanoparticles and tubes were used as a field emitter. The field emission patterns display very interesting features consisting of sharp rings which were often found to change their shapes. The patterns are attributed to the open ended nanotubes of aluminum nitride. A few dot patterns corresponding to the nanoparticles were also seen to occur. The Fowler-Nordheim plots were seen to be nonlinear in nature, which reflects the semi-insulating behavior of the emitter. The field enhancement factor is estimated to be 34 500 indicating that the field enhancement due to the nanometric size of the emitter is an important cause for the observed emission.
Focused ion beam (FIB) machines are key tools for state-of-the art sample preparation in electron microscopy, for characterization and repair in material sciences, for the semiconductor industry and for nanotechnology in general. Liquid-metal ion sources (LMIS) are widely used in FIB machines because they meet the minimum ion source requirements such as source brightness and reliability. However, in FIB machines, noble gas ion sources are favorable for sputtering, beam-induced etching and deposition, because the implanted ions do not change the electrical behavior of the substrate significantly. There are several efforts by various researchers to develop noble gas ion sources that can be used in FIB machines instead of LMIS. The gas ion sources could not meet the minimum ion source requirements. Therefore, LMIS are still a popular choice among FIB machine users. This review article takes a critical look at the reported efforts in the literature to develop noble gas ion sources for FIB machines.
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