2015
DOI: 10.1021/cg501689d
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Crystallization of Sputter-Deposited Amorphous (FeSi2)1–xAlx Thin Films

Abstract: Crystallization of sputter-deposited amorphous (FeSi 2 ) 1−x Al x on SiO 2 /Si substrate was studied for different fractions (x) of Al content varying from 0.033 to 0.081. The activation energy of crystallization for beta-phase iron-disilicide (β-FeSi 2 ) was extracted by using the Kissinger's method. It was found to be 2.93−4.01 eV for (β-FeSi 2 ) 1−x Al x thin film, increasing with x. The fraction of Al that can be incorporated into β-FeSi 2 without any phase transformation is ∼0.066. X-ray diffraction (XRD)… Show more

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Cited by 8 publications
(5 citation statements)
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“…1 shows the XRD spectra of Al alloyed FeSi 2 films for different RTA temperatures. A sharp distinct diffraction peak at 17°is observed for sample annealed at Z600°C conforming the formation of (001) planes of α-FeSi(Al) ternary alloy [2,12,15]. A low intensity peak at 52.8°is also observed corresponding to (003) orientations [15].…”
Section: Resultssupporting
confidence: 51%
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“…1 shows the XRD spectra of Al alloyed FeSi 2 films for different RTA temperatures. A sharp distinct diffraction peak at 17°is observed for sample annealed at Z600°C conforming the formation of (001) planes of α-FeSi(Al) ternary alloy [2,12,15]. A low intensity peak at 52.8°is also observed corresponding to (003) orientations [15].…”
Section: Resultssupporting
confidence: 51%
“…Growth of iron silicides on silicon has attracted a significant attention over the past decade owing to its huge potentials for application in silicon based integrated circuits to photo-electronic devices [1][2][3][4][5][6]. Iron silicide is an interesting material which exhibits at least three different phases namely; simple cubic ɛ-FeSi 2 , tetragonal α-Fesi 2 , and orthorhombic β-FeSi 2 [4].…”
Section: Introductionmentioning
confidence: 99%
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“…As the copper oxides provide the suitable band gaps for single junction and tandem solar cells, it is worthwhile to find n-type materials with suitable band gap. Moreover, the sputter deposition technique is industry compatible and suitable for large scale deployment [60,61,62,63,64]. …”
Section: Cu4o3 Thin Film Heterojunction Solar Cellsmentioning
confidence: 99%
“…In previous work [2932], Kissinger method was widely used to determine the activation energies with the reaction process that occur under linear heating rate conditions. Although this method has some limitations, it is acceptable when an isoconversional method was used to back up the veracity of the Kissinger method [33].…”
Section: Materials and Methodologymentioning
confidence: 99%