Crosstalk Reduction of Tactile Sensor Array with Projected Cylindrical Elastomer over Sensing Element

Sohgawa, Masayuki; Uematsu, Tatsuya; Mito, Wataru; Kanashima, Takeshi; Okuyama, Masanori; Noma, Hiroyasu

doi:10.1143/jjap.50.06gm08

Cited by 12 publications

(7 citation statements)

References 24 publications

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“…In this study, we have proposed a tactile sensor with microcantilevers embedded in the elastomer (polydimethylsiloxane; PDMS) for dexterous robots and fabricated by MEMS technologies. It is demonstrated that the fabricated tactile sensors can detect normal and shear forces simultaneously [30][31][32][33][34]. In the following section, the tactile sensors with sensitive cantilevers are described, and a fabricated tactile sensor array was applied for slippage detection when the object is held in the robot's hands and is slipped.…”

Section: Miniature Tactile Sensor Wiht Piezoresistive Micro-cantilevermentioning

confidence: 99%

“…The analysis of elastomer deformation by the finite element method showed that the optimal thickness of the flat elastomer on the substrate except for the cylinders is 50-100 μm, because the sensor structure has not only a low crosstalk but also considerable robustness [34]. A tactile sensor array having the flat elastomer of 70 μm thickness has little crosstalk and high robustness.…”

Section: Friction Measurement By Moving Tactile Sensor On Objectmentioning

confidence: 99%

See 1 more Smart Citation

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Okuyama¹,

Yamashita²,

Noda³

et al. 2012

Transactions on Electrical and Electronic Materials

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Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/SiO 2 and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or Si:B + piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

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Section: Miniature Tactile Sensor Wiht Piezoresistive Micro-cantilevermentioning

confidence: 99%

Section: Friction Measurement By Moving Tactile Sensor On Objectmentioning

confidence: 99%

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Okuyama¹,

Yamashita²,

Noda³

et al. 2012

Transactions on Electrical and Electronic Materials

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“…In our previous works, we developed a multiaxial MEMS tactile sensor that can detect normal and shear forces using microcantilevers with a NiCr strain gauge film. (17)(18)(19)(20)(21)(22)(23) This sensor has been applied to tactile texture measurement, thereby enabling qualitative classification of many kinds of objects. (24)(25)(26)(27) However, more quantitative tactile characterization is required to evaluate physical properties such as the hardness, thickness, and roughness of an object.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1 shows a conceptual illustration of the MEMS sensor, a microscopic image of the microcantilevers, and the cross-sectional structure of the microcantilever. (19)(20)(21)(22)(23) The microcantilevers are embedded in polydimethylsiloxane (PDMS). The microcantilever has a sloping form in order to be sensitive to both normal and shear forces.…”

Section: Introductionmentioning

confidence: 99%

Surface Texture Characterization Using Optical and Tactile Combined Sensor

2018

Sensors and Materials

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Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on the color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.

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“…This sensor can detect normal and shear forces simultaneously. [13][14][15][16][17][18] However, there appear some problems. One of the serious problems is the signal noise in the sensor output generated in the long wire from the sensor elements to the signal amplifier of integrated circuit (IC).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Noise Reduction of the Miniature Tactile Sensor Using Through-Silicon-Via Connection with Signal Amplifier

Yokoyama

Sohgawa

Kanashima

et al. 2013

Jpn. J. Appl. Phys.

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A miniature tactile sensor has been fabricated by connecting stress-sensitive part with an amplifier of integrated circuit through through-silicon-via (TSV) electrically. The sensitive part consists of three warped cantilevers with piezoresistive NiCr thin film which are prepared on a silicon-on-insulator wafer by the surface micromachining technique. The TSV connection can reduce noise of detected change of the piezoresistive output induced by wire between the sensitive part and the amplifier. Fabricated tactile sensor of 5×5 mm2 size has linear dependence of the output on both normal and shear forces. The output noise has been successfully decreased by 14 and 34% in the sensor using the TSVs compared with that using wires of 3 and 6 mm lengths, respectively.

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Crosstalk Reduction of Tactile Sensor Array with Projected Cylindrical Elastomer over Sensing Element

Cited by 12 publications

References 24 publications

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Surface Texture Characterization Using Optical and Tactile Combined Sensor

Fabrication and Noise Reduction of the Miniature Tactile Sensor Using Through-Silicon-Via Connection with Signal Amplifier

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