Correlation study of structural, optical and electrical properties of amorphous carbon thin films prepared by ion beam sputtering deposition technique

Mohagheghpour, Elham; Rajabi, M.; Gholamipour, Reza; Larijani, M. M.; Sheibani, Shahab

doi:10.1016/j.apsusc.2015.10.213

Cited by 31 publications

(14 citation statements)

References 28 publications

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“…In less times, the graphite nanocrystals have not yet formed and the main material is in the form of graphite. At higher times, the G peak shifts to lower wavenumbers [49] . The blue shift of G band caused by reducing the number of ordered aromatic rings contributes to the passing from graphite nanocrystals to amorphous carbon [50] .…”

Section: Resultsmentioning

confidence: 97%

Graphite nanocrystals coated paper-based electrode for detection of SARS-Cov-2 gene using DNA-functionalized Au@carbon dot core–shell nanoparticles

Farzin

Abdoos

Saber

2022

Microchemical Journal

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Section: Resultsmentioning

confidence: 97%

Graphite nanocrystals coated paper-based electrode for detection of SARS-Cov-2 gene using DNA-functionalized Au@carbon dot core–shell nanoparticles

Farzin

Abdoos

Saber

2022

Microchemical Journal

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“…A lot of efforts have been endeavored to produce large-scale a-C thin films with controllable thickness and properties. [14][15][16] The synthesis can be largely classified into physical vapor deposition (PVD), [17][18][19][20][21][22][23][24][25][26] chemical vapor deposition (CVD), [16,[27][28][29][30][31][32][33][34] and thermal conversion (TC). [14,15,[35][36][37][38] PVD from the graphite sources through sputtering, [17][18][19][20] evaporation, [21][22][23] and filtered vacuum arc deposition [24][25][26] have been widely used for high-quality thin films and surface coatings.…”

Section: Synthesis and Doping Of The A-c Thin Filmsmentioning

confidence: 99%

“…[14][15][16] The synthesis can be largely classified into physical vapor deposition (PVD), [17][18][19][20][21][22][23][24][25][26] chemical vapor deposition (CVD), [16,[27][28][29][30][31][32][33][34] and thermal conversion (TC). [14,15,[35][36][37][38] PVD from the graphite sources through sputtering, [17][18][19][20] evaporation, [21][22][23] and filtered vacuum arc deposition [24][25][26] have been widely used for high-quality thin films and surface coatings. The vapor phase carbons are solidified to form a solid film on a substrate at a controllable temperature (0-600 °C).…”

Section: Synthesis and Doping Of The A-c Thin Filmsmentioning

confidence: 99%

“…The relative ratio (I D /I G ) of the D and the G Raman bands of the a-C thin films showed a wide range of variation (0.44-4.2) depending on the synthetic methodology. [18,[50][51][52] Figure 4c shows an example (I D /I G = 0.82) that was obtained from MAC produced on a copper substrate. [16] The large D-G ratio with a wide distribution indicates the existence of a large number of defects limiting the formation of complete 6-membered sp 2 bonds.…”

Section: Synthesis and Doping Of The A-c Thin Filmsmentioning

confidence: 99%

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Amorphous Carbon Films for Electronic Applications

et al. 2022

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While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a‐C) thin films have received relatively little attention. The a‐C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure–property relationships have been accumulated. As the a‐C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a‐C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro‐supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a‐C thin films.

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“…Some peaks have been combined or subdivided in other research, ( [10] and [24] just used two peaks while [25] used nine peaks) but for the sake of the fit in this study, the peaks were limited to six to prevent overfitting. Overfitting was briefly checked by obtaining similar fits from different initial conditions.…”

Section: Raman Spectroscopymentioning

confidence: 99%

Using non-destructive testing to predict bending modulus of carbon infiltrated-carbon nanotubes

Fagergren¹,

Sypherd²,

Snow³

et al. 2019

J. Micromech. Microeng.

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Carbon infiltrated carbon nanotubes (CI-CNT) are an important emerging material in several micro-electro-mechanical systems (MEMS) because of their unique mechanical and chemical properties. While CI-CNTs are only roughly conductive they work well in micro springs, levers, and meshes. However, fabrication of CI-CNTs can result in large mechanical property variation, and methods to characterize properties usually involve destructive testing. Destructive testing also assumes the tested specimens are representative of the entire batch which is not always true in the case of CI-CNT production. Finding a non-destructive way to test for stiffness of this material reduces the number of parts that have to be made and increases confidence in the integrity of device being used. It also simplifies testing of complex parts. The stiffness of CI-CNT beams is related to the molecular structure of the carbon material infiltrated between the carbon nanotubes (CNTs), how it interacts with the CNTs, and how much of it there is. The amount of material can be approximated with the density of the beam, and both the type of material and its interaction with the CNTs can be approximated through analysis of the Raman spectra taken at the surface. A combination of these two observations can be related to the effective material stiffness. The relationship can be fitted with a power function, with a variance of 1.41 GPa, which is about 11% of the maximum stiffness of the samples tested.

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Correlation study of structural, optical and electrical properties of amorphous carbon thin films prepared by ion beam sputtering deposition technique

Cited by 31 publications

References 28 publications

Graphite nanocrystals coated paper-based electrode for detection of SARS-Cov-2 gene using DNA-functionalized Au@carbon dot core–shell nanoparticles

Graphite nanocrystals coated paper-based electrode for detection of SARS-Cov-2 gene using DNA-functionalized Au@carbon dot core–shell nanoparticles

Amorphous Carbon Films for Electronic Applications

Using non-destructive testing to predict bending modulus of carbon infiltrated-carbon nanotubes

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