“…Also, the changes in frequency have an important effect on determination of the M-S structures [17,19]. The voltage and frequency dependence of series resistance (R S ) at metal-semiconductor structures play an important role in the determination of the main parameters of the devices [9,[20][21][22]. When voltage is applied across the M-S structure, the combination of the interfacial insulator layer, depletion layer and the series resistance of the device will share applied voltage.…”