2000
DOI: 10.1063/1.372013
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Correlation between luminescence and structural properties of Si nanocrystals

Abstract: Strong room-temperature photoluminescence (PL) in the wavelength range 650–950 nm has been observed in high temperature annealed (1000–1300 °C) substoichiometric silicon oxide (SiOx) thin films prepared by plasma enhanced chemical vapor deposition. A marked redshift of the luminescence peak has been detected by increasing the Si concentration of the SiOx films, as well as the annealing temperature. The integrated intensity of the PL peaks spans along two orders of magnitude, and, as a general trend, increases … Show more

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Cited by 510 publications
(373 citation statements)
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“…A technologically important structure, which is fully complementary metal-oxide semiconductor ͑CMOS͒ compatible and takes advantage of the well-known good passivation and stability of the Si/ SiO 2 interface, consists of crystalline silicon nanoclusters ͑Si-ncl͒ dispersed in an amorphous SiO 2 matrix. 1,2 The mechanisms of light emission in these structures have been studied intensively. Time-resolved photoluminescence ͑PL͒ measurements have shown a nonexponential PL intensity decay in the microsecond range that can be fit by the stretched-exponential function I͑t͒ =I 0 exp͓−͑t / ͒ ␤ ͔, where I 0 is the initial PL intensity, is a lifetime, and ␤ Յ 1 is a dispersion exponent.…”
Section: Introductionmentioning
confidence: 99%
“…A technologically important structure, which is fully complementary metal-oxide semiconductor ͑CMOS͒ compatible and takes advantage of the well-known good passivation and stability of the Si/ SiO 2 interface, consists of crystalline silicon nanoclusters ͑Si-ncl͒ dispersed in an amorphous SiO 2 matrix. 1,2 The mechanisms of light emission in these structures have been studied intensively. Time-resolved photoluminescence ͑PL͒ measurements have shown a nonexponential PL intensity decay in the microsecond range that can be fit by the stretched-exponential function I͑t͒ =I 0 exp͓−͑t / ͒ ␤ ͔, where I 0 is the initial PL intensity, is a lifetime, and ␤ Յ 1 is a dispersion exponent.…”
Section: Introductionmentioning
confidence: 99%
“…Recently the subject of wide bandgap oxides and nitrides have gained interest within the context of nanocrystals which offer silicon-based technology for light emitting devices and semiconductor memories 3 . These nanocrystals are embedded in an insulating matrix which is usually chosen to be silica 4,5,6,7 . However, other wide bandgap materials are also employed such as germania 8,9 , silicon nitride 10,11,12 , and alumina 13,14,15 .…”
Section: Introductionmentioning
confidence: 99%
“…2,3 The spectral shapes are very similar, even though their full width at half maximum is narrower ͑close to ϳ90 nm, i.e., ϳ0.190 eV͒ than the one obtained in similar samples under optical pumping. 16 This can be attributed to interference effects caused by multiple reflections in the poly-Si layer, as revealed by transmittance measurements ͑figure not shown͒. The small peak shift is attributed to the different refractive index contrast at the poly-Si/insulator interface that modifies the interference pattern of the stack.…”
mentioning
confidence: 99%