Control of the bias voltage in d.c. PVD processes on insulator substrates

Yate, Luis; Martínez-de-Olcoz, L.; Esteve, J.; Lousa, A.

doi:10.1016/j.vacuum.2009.03.025

Cited by 9 publications

(4 citation statements)

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“…Independently of the deposition process, substrate biasing assures energetic ion bombardment thus improving film properties [12,13] in accordance with the well-known structure zone diagram [4,14]. Commonly, the bias waveforms depend of the electrical properties of substrate, resulting in a DC bias voltage to be used for conductive substrates and an AAC bias in the case of insulating substrates in order to realize the ion bombardment control in a most efficient way.…”

Section: Introductionmentioning

confidence: 98%

A poly-diagnostic study of bipolar high-power magnetron sputtering: role of electrical parameters

Michiels¹,

Snyders²,

Britun³

2020

J. Phys. D: Appl. Phys.

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Ion acceleration in a bipolar high-power impulse magnetron sputtering discharge working with Ar gas and using a Ti cathode has been investigated. The multiple discharge diagnostic approaches have been implemented, including the target and substrate current probe measurements, mass spectrometry and laser-induced fluorescence. In particular, the current waveforms were analysed in detail, showing the particularities of the current evolution during the negative (plasma) and positive voltage pulses. It is shown that the substrate current during the positive voltage pulse reveals two peaks, corresponding, as suggested, to two groups of the positive ions repulsed from the cathode by the applied positive potential. These observations correlate well with the mass spectrometry measurements as well as with the two-dimensional ion density mapping performed for several discharge conditions by laser-induced fluorescence imaging technique.

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Section: Introductionmentioning

confidence: 98%

A poly-diagnostic study of bipolar high-power magnetron sputtering: role of electrical parameters

Michiels¹,

Snyders²,

Britun³

2020

J. Phys. D: Appl. Phys.

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“…Figure 7 shows the hardness profiles that were obtained in the different samples studied in this paper. Due to the non-conductive nature of the ceramic substrates, direct current (DC) biasing the samples is useless, since the substrate surface will not follow the applied bias voltage, which affects the growth of the coatings, leading to hardness values that are much lower than the reference values obtained on metallic substrates (18 GPa for CrN and 24 GPa for TiN) [25]. In addition, the measured hardness of the coatings decreased rapidly with the depth of indentation, being significantly affected by the relative softness of the substrate.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

Antibacterial Functionalization of PVD Coatings on Ceramics

et al. 2018

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Abstract:The application of surface treatments that incorporate silver or copper as antibacterial elements has become a common practice for a wide variety of medical devices and materials because of their effective activity against nosocomial infections. Ceramic tiles are choice materials for cladding the floors and walls of operation rooms and other hospital spaces. This study is focused on the deposition of biocide physical vapor deposition (PVD) coatings on glazed ceramic tiles. The objective was to provide antibacterial activity to the surfaces without worsening their mechanical properties. Silver and copper-doped chromium nitride (CrN) and titanium nitride (TiN) coatings were deposited on samples of tiles. A complete characterization was carried out in order to determine the composition and structure of the coatings, as well as their topographical and mechanical properties. The distribution of Ag and Cu within the coating was analyzed using glow discharge optical emission spectrometry (GD-OES) and field emission scanning electron microscope (FE-SEM). Roughness, microhardness, and scratch resistance were measured for all of the combinations of coatings and dopants, as well as their wettability. Finally, tests of antibacterial efficacy against Staphylococcus aureus and Escherichia coli were carried out, showing that all of the doped coatings had pronounced biocide activity.

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“…In fact, the disappearance of the interferometric features in the reflectance spectra occurs at the same annealing temperature where the Au crystallization starts to be detected. The relatively low values of the reflectivity at shorter wavelengths are characteristic of high free electron density systems (Yate et al, 2009). Increasing the annealing temperature, the films of group II and group III change their behaviour in comparison with the as deposited sample, from interference-like to intrinsiclike, as revealed by the surface colour tones that tend to a red-brownish colour, in comparison to the interferometric tones of the as-deposited and 200 ºC annealed samples (group I), figure 10.…”

Section: Optical Propertiesmentioning

confidence: 99%