Control of large area VHF plasma produced at high pressure

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure between the discharge electrodes and significantly decreases outside the electrodes at a high gas pressure. The power absorption efficiency between the electrodes was improved by increasing the gas pressure. In addition, the plasma was produced efficiently between the electrodes at low applied voltages.

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“…The electron displacement x m in the sheath electric field generated by the VHF voltages for ! ( m is expressed as 28) x…”

Section: Simulation Resultsmentioning

confidence: 99%

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Ogiwara

Chen

Uchino

et al. 2013

Jpn. J. Appl. Phys.

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“…Thus, we succeeded in realizing a stable VHF discharge inside two parallel plate electrodes. 17) The frequency of a VHF power source was 60 MHz and the power was up to 1 kW. The gas used was H 2 , and the pressures ranged from 50 to 140 Pa.…”

Section: Experimental Methodsmentioning

confidence: 99%

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Lien

Chen

Yang

et al. 2015

Jpn. J. Appl. Phys.

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A capacitively coupled VHF H 2 plasma (60 MHz) was produced at high pressures, and plasma parameters were examined as a function of pressure and power at different discharge gaps (10, 15, and 20 mm). Here, a balanced power feeding method was adopted to avoid anomalous discharges. It was found that the electron density peaked at a certain pressure. As the discharge gap decreased, the peak pressure increased. The electron temperatures at the discharge gaps of 10 and 20 mm were approximately 8 and 3 eV at high pressures, respectively. In addition, we found that the sheath potential corresponding to the ion bombardment energy with the discharge gap of 10 mm was lower than the theoretical value calculated on the basis of the sheath theory, suggesting the existence of negative ions. Estimation of negative ion concentration was attempted on the basis of the sheath theory taking into consideration negative ions.

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“…A balanced power feeding method [7] is a powerful one to avoid such anomalous discharges. In fact, a stable VHF H 2 plasma at high pressure was realized using the balanced power feeding method [8].…”

Section: Introductionmentioning

confidence: 99%

Production of a uniform VHF H2 plasma by a narrow-gap discharge

Lien

Chen

Yang

et al. 2015

Vacuum

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Control of large area VHF plasma produced at high pressure

Cited by 8 publications

References 16 publications

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Production of a uniform VHF H2 plasma by a narrow-gap discharge

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Control of large area VHF plasma produced at high pressure

Cited by 8 publications

References 16 publications

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

Characteristics of a VHF H2plasma at high pressures for different discharge gaps

Production of a uniform VHF H2 plasma by a narrow-gap discharge

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Characteristics of a VHF H₂plasma at high pressures for different discharge gaps