Considerations for Efficient Airflow Design in Cleanrooms

Xu, Tengfang

doi:10.17764/jiet.47.1.y66g4752h3882055

Cited by 13 publications

(5 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…15 Recirculation air system efficiency for ISO Class 4 and 5 cleanrooms collectively ranges from approximately 31 m 3 /min/kW to 297 m 3 /min/kW (1100-10,500 ft 3 /min/kW), corresponding to an approximate EPI range of 3.5-31.8 W/(m 3 /min) (0.10-0.90 W/(ft 3 /min)) for all recirculation air systems. 15 Compared to FFU systems in ISO Class 5 cleanrooms, where EPI ranging from 26.5 to 27.5 W/(m 3 /min) (0.75-0.78 W/(ft 3 /min)) corresponds to average cleanroom air speeds from 0.10 to 0.15 m/sec (20-29 ft/min), 16 airflow speeds in the minienvironment are much higher and EPI values are lower. This indicates a more energy-efficient air system in the minienvironment than in the cleanrooms.…”

Section: Energy Performance Indexmentioning

confidence: 99%

A Study on the Operation Performance of a Minienvironment System

2006

Journal of the IEST

Self Cite

View full text Add to dashboard Cite

A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment. Minienvironments have been gaining popularity as a means to provide effective containment for critical contamination control. The use of minienvironments can provide several orders of magnitude improvement in particle cleanliness levels, while energy intensity may be shifted from the conventional cleanroom systems to the minienvironments that enclose specific processes. Prior to this study, there was little information available or published to quantify the energy performance of minienvironment systems. This paper will present quantitative results from a recent study of the operation performance of an open-loop minienvironment air system in a ballroom setting, including quantification of operation range, energy performance index, pressure control, electric power density, and airflows. The paper also provides a comparison of the newly measured results from this study with previously measured cleanroom performance. The results can serve as a starting point for identifying areas for energy savings from applying high-performance minienvironments in cleanrooms.

show abstract

Section: Energy Performance Indexmentioning

confidence: 99%

A Study on the Operation Performance of a Minienvironment System

2006

Journal of the IEST

Self Cite

View full text Add to dashboard Cite

show abstract

“…Due to a huge volume of recirculation air flow rate, a proper design on the air path can reduce airflow resistance and therefore increase the energy efficiency significantly [4]. Over the years, many, many articles addressed the opportunities to reduce energy [5][6][7][8] and construction cost [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms

Lin

2015

Energy and Buildings

Self Cite

View full text Add to dashboard Cite

“…An efficient airflow system may not only reduce initial costs, but also help cleanrooms achieve operation reliability. [1,2] Air-recirculation system with ceiling supply and wall-return airflow is traditionally used in non-unidirectional airflow cleanroom. While in the traditional airflow cleanroom, locations and layouts of the production lines affect much on particle diffusion.…”

Section: Introductionmentioning

confidence: 99%

Experimental Investigations on Effect of Particles Removal in Cleanroom with Non-Unidirectional Airflow

Wang

2014

AMM

View full text Add to dashboard Cite

Efficient airflow delivery is key to achieve effective contamination control for a high-performance cleanroom. The influence of airflow organization on effect of particles removal in cleanroom with non-unidirectional airflow was investigated in this paper. A series of experiments were conducted on a cleanroom experimental platform with different airflow organization modes and supply air volume variation by frequency converter ( 40 to 50 Hz, 5Hz interval) on air-supply fan unit. The results showed that higher cleanliness could be gained at local area in cleanroom with radial airflow organization. Moreover, the outcomes from these experiments indicated that particle concentration at measuring points appeared more orderly when the cleanroom operated with radial airflow organization. The conclusion can be drawn that radial airflow can benefit contamination control at local area for cleanroom operation with non-unidirectional airflow when compared with ceiling-supply and wall-return airflow organization.

show abstract

Considerations for Efficient Airflow Design in Cleanrooms

Cited by 13 publications

References 2 publications

A Study on the Operation Performance of a Minienvironment System

A Study on the Operation Performance of a Minienvironment System

Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms

Experimental Investigations on Effect of Particles Removal in Cleanroom with Non-Unidirectional Airflow

Contact Info

Product

Resources

About