Experimental Investigations on Effect of Particles Removal in Cleanroom with Non-Unidirectional Airflow

Abstract

Efficient airflow delivery is key to achieve effective contamination control for a high-performance cleanroom. The influence of airflow organization on effect of particles removal in cleanroom with non-unidirectional airflow was investigated in this paper. A series of experiments were conducted on a cleanroom experimental platform with different airflow organization modes and supply air volume variation by frequency converter ( 40 to 50 Hz, 5Hz interval) on air-supply fan unit. The results showed that higher cleanliness could be gained at local area in cleanroom with radial airflow organization. Moreover, the outcomes from these experiments indicated that particle concentration at measuring points appeared more orderly when the cleanroom operated with radial airflow organization. The conclusion can be drawn that radial airflow can benefit contamination control at local area for cleanroom operation with non-unidirectional airflow when compared with ceiling-supply and wall-return airflow organization.

Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems

“…Laminar flow is also broadly utilized to sustain cleanliness in various industries, such as biological and microelectronic manufacturing [ 31 , 32 ], food production [ 33 , 34 ], and hospital operating rooms [ 35 , 36 ]. The design of flow channels, such as wall-return [ 37 ], celling return [ 38 ], and radial [ 39 ], contributes to the parallel and perpendicular flow of air, providing different levels of protection. Researchers have investigated the factors that impact laminar flow’s effectiveness in maintaining a clean environment and found that the flow velocity (or air change rate) and particle diameter (gravity) play a decisive role, assuming the layout of the clean room is determined (the flow channel is fixed).…”