Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms

Assessment of the SEMI energy conversion factor and its application for semiconductor and LCD fabs

“…Therefore, there are many studies concerning the environmental http control of the clean room and potential ways for energy saving with the sub-systems. For example, Lin et al [3] developed a fan dry coil unit (FDCU) return system for the requirement of air circulation in a clean room to improve the efficiency of energy use. Their experimental results revealed that compared to the traditional wall-return air circulation system in the clean room, the proposed system was much more effective at heat removal from the process tools and could also reduce the energy consumption by 4%.…”

Energy efficient design and control of cleanroom environment control systems in subtropical regions – A comparative analysis and on-site validation

“…The same method used in dry region is then used to calculate the overall heat transfer resistance (R), as shown in Eqs. (9)(10)(11)(12)(13). )…”

“…demand-controlled filtration (DCF) based on real-time monitoring of particle concentrations. Lin et al [9] developed a fan dry coil unit return system for improving the energy efficiency of cleanrooms.…”

Surface Cleanliness Maintenance with Laminar Flow Based on the Characteristics of Laser-Induced Sputtering Particles in High-Power Laser Systems

“…Laminar flow is also broadly utilized to sustain cleanliness in various industries, such as biological and microelectronic manufacturing [ 31 , 32 ], food production [ 33 , 34 ], and hospital operating rooms [ 35 , 36 ]. The design of flow channels, such as wall-return [ 37 ], celling return [ 38 ], and radial [ 39 ], contributes to the parallel and perpendicular flow of air, providing different levels of protection.…”