Assessment of the SEMI energy conversion factor and its application for semiconductor and LCD fabs

Hu, Shih−Cheng; Tsai, Yao-Wen; Fu, Ben-Ran; Chang, Chih‐Sheng

doi:10.1016/j.applthermaleng.2017.04.044

Cited by 23 publications

(11 citation statements)

References 12 publications

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“…Each process tool in a lab consumes energy either directly during its operation or indirectly through other facilities or sub-systems (e.g., process vacuum systems or compressed dry air) [ 186 , 187 ]. Manufacturing equipment for more complex semiconductors, larger diameter wafers and the requirement for improved cleanrooms have vastly increased the energy consumption [ 188 ].…”

Section: Materials Challenges In Environmental Safety Health and Sustainability In The Semiconductor Industrymentioning

confidence: 99%

Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective

Mullen

Morris

2021

Nanomaterials

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The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene epoch, characterised by the ever-increasing human impact on the environment. The ecological consequences of semiconductor chip manufacturing are the most predominant within the electronics industry. This is due to current reliance upon large amounts of solvents, acids and gases that have numerous toxicological impacts. Management and assessment of hazardous chemicals is complicated by trade secrets and continual rapid change in the electronic manufacturing process. Of the many subprocesses involved in chip manufacturing, lithographic processes are of particular concern. Current developments in bottom-up lithography, such as directed self-assembly (DSA) of block copolymers (BCPs), are being considered as a next-generation technology for semiconductor chip production. These nanofabrication techniques present a novel opportunity for improving the sustainability of lithography by reducing the number of processing steps, energy and chemical waste products involved. At present, to the extent of our knowledge, there is no published life cycle assessment (LCA) evaluating the environmental impact of new bottom-up lithography versus conventional lithographic techniques. Quantification of this impact is central to verifying whether these new nanofabrication routes can replace conventional deposition techniques in industry as a more environmentally friendly option.

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Section: Materials Challenges In Environmental Safety Health and Sustainability In The Semiconductor Industrymentioning

confidence: 99%

Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective

Mullen

Morris

2021

Nanomaterials

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“…These facilities and materials are all considered in the FES, as described in a previous study [7]. Hu et al [6] developed a new ECF calculator, based on SEMI S23-0813, to understand the energy consumption in fabs with different operating conditions and/or scale. The detailed description and mathematical models for the different systems are described in Refs.…”

Section: Fes Tool and Ecf Calculatormentioning

confidence: 99%

“…The ECFs can be employed to estimate the energy consumption of utilities and, consequently, they can be used to discover energy savings for high-tech fabs. Recently, Hu et al [6] applied SEMI's ECFs to semiconductor and LCD manufacturing plants, and they further developed a new ECF calculator with corresponding mathematical models for each subsystem or utility in high-tech fabs. Their calculated ECF values were very close to SEMI's ECFs under the same operating conditions.…”

Section: Introductionmentioning

confidence: 99%

“…Manufacturers aim for every link to work efficiently, and they also seek possible energy savings to reduce production costs as well as to maintain competitiveness. Considering the issues raised above, the objective of this study, complementary to previous studies [6,7], is to integrate the fab energy simulation (FES) tool and energy conversion factor (ECF) to analyze the energy use of high-tech fabs. The energy performance of the utility system of a fab can be realized and therefore the specific influences on each system can be analyzed.…”

Section: Introductionmentioning

confidence: 99%

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Integration and Application of the Fab Energy Simulation (FES) Tool and Energy Conversion Factors (ECF) for High-Tech Factories

Lin,

Huang,

Fu*

et al. 2020

Preprint

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“…The temperatures in inside buildings are high during the summer in Taiwan because it is located in a tropical zone. How to reduce the temperature and save air conditioning energy must be considered during construction (Chang and Lee, 2016; Hu et al , 2017). Figure 1 shows a common tall factory building, in which the main gateways are in the lower part of the space.…”

Section: Introductionmentioning

confidence: 99%

Analysis of tilted neutral planes for tall space fires with unsymmetrical openings using numerical simulation and Schlieren photography technique

Su¹,

Wang²

2019

HFF

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Purpose The purpose of this paper is to analyze the variations in the neutral plane when a tall space with unsymmetrical openings is on fire. The neutral plane of the fire scene is an important index of a natural smoke exhaust system. The numerical simulation method and the Schlieren photography technique were used as analysis tools. The results of model experiments and numerical simulation were compared with each other to confirm the rationality of the conclusions. The results were to discuss the characteristics of various cases and showed that the neutral planes of the fire scene were not always horizontal. Design/methodology/approach The numerical simulation method and the Schlieren photography technique were used as analysis tools. The flow patterns of hot air in various cases were recorded using the flow visualization technique. In addition, the renowned simulation software, fire dynamics simulator (FDS), was used for case analysis. The Schlieren photography technique was used for 1/12.5 model experiments with six smokeless candles burned, and FDS was used for a numerical simulation. In terms of the case of unilateral vents, the exhaust efficiency was discussed when the exhaust vent and air inlet were located on the same side or different sides. Findings This study demonstrates that makeup air flowing in from the inlets and openings has a significant impact on the effectiveness of natural smoke exhaust systems. The results illustrated that the neutral planes were tilted in some cases. In some cases, the results showed that one side was the air inlet and the other side was the exhaust vent, even if the openings were at the same height in some cases. These phenomena have rarely been discovered or studied in the past. The exhaust efficiency was not always better when the vent was located in the rooftop. Originality/value This study analyzed the neutral plane of a fire scene using the common unsymmetrical opening spaces in the Taiwan region as an example. The phenomenon of non-horizontal neutral plane has rarely been studied in the past. The temperature of the discharged hot gas was low because of an efficient exhaust effect, which reduced the heat and smoke storage in the space. The results obtained by these two methods were consistent, and showed that the cases with the same opening area had different smoke extraction efficiencies, meaning the smoke extraction effect cannot be judged only by the opening areas.

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Assessment of the SEMI energy conversion factor and its application for semiconductor and LCD fabs

Cited by 23 publications

References 12 publications

Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective

Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective

Integration and Application of the Fab Energy Simulation (FES) Tool and Energy Conversion Factors (ECF) for High-Tech Factories

Analysis of tilted neutral planes for tall space fires with unsymmetrical openings using numerical simulation and Schlieren photography technique

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