Compressive elastic moduli and polishing performance of non-rigid core/shell structured PS/SiO2 composite abrasives evaluated by AFM

Chen, Ailian; Mu, Weibin; Chen, Yang

doi:10.1016/j.apsusc.2013.11.100

Cited by 38 publications

(12 citation statements)

References 39 publications

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“…In addition to an enhanced chemical reaction, the morphologic differences of a silica shell can also affect the CMP performance of abrasives. Core–shell structured PS@SiO 2 particles with spherical silica as the shell were synthesized [ 94 ] and achieved a higher MRR of 387 ± 44 nm/min, which might be attributed to the enhanced mechanical action in CMP caused by the rough appearances of the spherical silica shell. The CMP performance of PS@SiO 2 on the Cu substrate was also investigated [ 16 ] and achieved a great reduction of RMS surface roughness (from 4.27 to 0.56 nm) by 86.89% compared with pure SiO 2 abrasives ( Figure 18 ).…”

Section: Applicationsmentioning

confidence: 99%

Synthesis of Core–Shell Micro/Nanoparticles and Their Tribological Application: A Review

Chen

Lin

et al. 2020

Materials

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Owing to the diverse composition, adjustable performance, and synergistic effect among components, core–shell micro/nanoparticles have been widely applied in the field of tribology in recent years. The strong combination with the matrix and the good dispersion of reinforcing fillers in the composites could be achieved through the design of core–shell structural particles based on the reinforcing fillers. In addition, the performance of chemical mechanical polishing could be improved by optimizing the shell material coated on the abrasive surface. The physical and chemical state of the core–shell micro/nanoparticles played important effects on the friction and wear properties of materials. In this paper, the synthesis methods, the tribological applications (acted as solid/liquid lubricant additive, chemical mechanical polishing abrasives and basic units of lubricant matrix), and the functionary mechanisms of core–shell micro/nanoparticles were systematically reviewed, and the future development of core–shell micro/nanoparticles in tribology was also prospected.

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Section: Applicationsmentioning

confidence: 99%

Synthesis of Core–Shell Micro/Nanoparticles and Their Tribological Application: A Review

Chen

Lin

et al. 2020

Materials

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“…37 The observations for used abrasive particles may provide more related information, and is in favor of revealing the actual material removal mechanism in CMP. In our previous work, 38 the structural stability of the core/shell PS/SiO 2 composites with different shell morphology during CMP was investigated by AFM. The composites with smooth shells composed of amorphous silica network exhibited an enhanced structural stability by compared to the composites with rough shells consisted of separate SiO 2 nanoparticles.…”

Section: Mechanical Stability Of Composite Particlesmentioning

confidence: 99%

Polystyrene core–silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability

Chen

Qin

2017

RSC Adv.

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“…However, TEOS also allows the coating of nanostructures with an aspect ratio greater than one. For example, carbon nanotubes were successfully coated with silica using this approach [26][27][28].…”

Section: Introductionmentioning

confidence: 99%

Method for High-Yield Hydrothermal Growth of Silica Shells on Nanoparticles

et al. 2021

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Coating processes are commonly used in materials science to protect a core or modify material properties. We describe a hydrothermal coating process using TEOS (tetraethyl orthosilicate), a widely used precursor for silica coatings, on three representative template materials (carbon nanotubes, silica, and polystyrene nanoparticles) with different properties and shapes. We compare the efficiency of previously published protocols for silica coatings at room temperature and atmospheric pressure with the hydrothermal process at 160 °C and 3 bar. The hydrothermal method achieves higher yields and thicker silica coatings with the same amount of precursor when compared to the conventional way, thus offering higher effectiveness. Furthermore, the hydrothermal coating process yields more homogeneous shells with a higher density, making hydrothermal coating the method of choice when mechanical integrity and low permeability of the coating are required.

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Compressive elastic moduli and polishing performance of non-rigid core/shell structured PS/SiO2 composite abrasives evaluated by AFM

Cited by 38 publications

References 39 publications

Synthesis of Core–Shell Micro/Nanoparticles and Their Tribological Application: A Review

Synthesis of Core–Shell Micro/Nanoparticles and Their Tribological Application: A Review

Polystyrene core–silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability

Method for High-Yield Hydrothermal Growth of Silica Shells on Nanoparticles

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