Comprehensive contact material selection approach for RF MEMS switch

Sawant, Vishram B.; Mohite, Suhas S.; Cheulkar, Laukik N.

doi:10.1016/j.matpr.2017.12.352

Cited by 14 publications

(9 citation statements)

References 14 publications

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“…The high Young's modulus and potential for low resistance of CNTs makes them suitable candidates for micro-switch contacts. Experiments have shown that adding a small amount of Pd or Pt to the gold increases the lifetime of the device, but the contact resistance increases only a small amount [38]. In order to prevent the degradation of switch contact, apart from preventing the mechanical damage of the contact surface, it is necessary to improve the sealing of the packaging to prevent organic or inorganic pollution [61].…”

Section: Introductionmentioning

confidence: 99%

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Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

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Section: Introductionmentioning

confidence: 99%

“…On the other hand, resistive switches are generally used in the lower frequency band (about 30 KHz to 300 KHz) of the radio frequency signal [ 37 ]. Low contact resistance, usually less than 1–2 ohms, is one of the important performance requirements of MEMS switches [ 38 ].…”

Section: Introductionmentioning

confidence: 99%

Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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“…Many researchers have adopted the method pioneered by Ashby especially for MEMS design, [18][19][20][21][22][23] while others comparatively studied different approaches with Ashby's method. 21,24 On such a chart, it is easy to find the material with the highest stiffness or one with the lowest density but also with the best ratio respective to the design requirements.…”

Section: Screening Methodsmentioning

confidence: 99%

A systematic review on material selection methods

Rahim

Musa

Ramesh

et al. 2020

Proceedings of the Institution of Mechanical Engineers, Part L:

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Technological advancements and the growing material set in the world have created a large variety of options for industrial designers, but little attention has been given to the tools and methods that support material selection processes. In this paper, we report on a comprehensive systematic literature review (SLR) guided by the Preferred Reporting Items for Systematic Reviews and Meta-Analyses (PRISMA) statement on methods or approaches reported for supporting material selection processes. This review covers various published literature, spanning from 2000 to 2018. The purpose is to examine in detail the evolution of the extensive body of research, its research streams and to position possible areas for further research. A classification framework consisting of six categories of selection approaches was derived from the extensive literature. Additionally, a detailed analysis of predominant approaches was presented along with their advantages and limitations with respect to the material selection domain. Taken together, the insights gained from this study may be of assistance to new researchers and practitioners who are looking for potential selection methods for their specific applications. The review also found that there is an increasing trend of research in recent years in the area of OR-based method application specifically on the multi-criteria decision-making supporting material selection processes.

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“…This behavior can be understood by taking into account the quality of the electrical contact. When dealing with microswitches, the quality of the contact is always an issue and is of paramount importance in the case of ohmic switches [35]. In MEMS devices, the contact forces are usually very low because of the small contact dimensions and a low contact force may result in a bad electric contact and bad switch performance.…”

Section: Instabilities Due To Fabrication Uncertainties and Materials mentioning

confidence: 99%

Instability and Drift Phenomena in Switching RF-MEMS Microsystems

Mulloni

2019

Actuators

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MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices.

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Comprehensive contact material selection approach for RF MEMS switch

Cited by 14 publications

References 14 publications

Research Status and Development Trend of MEMS Switches: A Review

Research Status and Development Trend of MEMS Switches: A Review

A systematic review on material selection methods

Instability and Drift Phenomena in Switching RF-MEMS Microsystems

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