Research Status and Development Trend of MEMS Switches: A Review

Abstract

MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

Locking Multi-Laser Frequencies to a Precision Wavelength Meter: Application to Cold Atoms

“…First, the stabilization could be done with a WLM of a finer resolution of 200 kHz [ 25 ]. Second, it would be possible to employ a high-speed microelectromechanical system (MEMS) optical switch [ 48 , 49 ] or micromirrors [ 50 ] for reducing the time delay occurred in the multi-channel lock. Recent works reported a switching speed <10 s in several configurations [ 51 , 52 ].…”

Locking Multi-laser Frequencies to a Precision Wavelength Meter: Application to Cold Atoms

“…First, the stabilization could be done with a WLM of a finer resolution of 200 kHz [24]. Second, it would be possible to employ a high-speed microelectromechanical system (MEMS) optical switch [40,41] or micromirrors [42] for reducing the time delay occurred in the multi-channel lock. Recent works reported a switching speed < 10 µs in several configurations [43,44].…”

Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

“…In contrary, this instability is to be avoided in applications involving resonating and sensing operations [ 11 , 12 ]. The co-existence of states under the same actuating force showlots of potential in applications ranging from sensors, filters, harvesters, and large-stroke switches [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ]. The motion between the two stable states is known as the snap-through motion.…”

“…The motion between the two stable states is known as the snap-through motion. This bi-stable behavior is desirable in various applications such as micro-actuators [ 4 , 5 , 6 , 7 ], micro-resonators [ 13 ], bifurcation-based gas sensors [ 14 ], micro-tweezers [ 15 ], micro-valves [ 16 ], micromechanical based memories with curved electrode arrangement for reduced actuating voltage [ 17 ], micro-switches [ 18 ], and large stroke and buckling based smart applications [ 19 ].…”