Comparison of tunnel currents through SiO<inf>2</inf>, HfO<inf>2</inf>, Ta<inf>2</inf>O<inf>5</inf>, ZrO<inf>2</inf> and Dy<inf>2</inf>O<inf>3</inf> dielectrics in MOS devices for ultra large scale integration using first principle calculations
Abstract:The work presented in this paper focuses on the effects of high leakage current in field effect transistors and the possible ways to play down with the leakage currents. This paper combines density functional theory and non equilibrium Green's function formalism to perform atomic scale calculation of tunnel currents through SiO 2, HfO 2 , Ta 2 O 5, ZrO 2 and Dy 2 O 3 dielectrics in MOSFETs. The tunnel currents for different bias voltages applied to Si/Insulator/Si systems have been obtained along with tunnel c… Show more
“…As a possible replacement for gate dielectrics, Dy2O3 is one of the most promising REO materials owing to its high dielectric constant (k = 14-18), a large energy band gap (4.9 eV), and thermal and chemical stability with silicon [14]- [16]. Researchers have already reported that Dy2O3 exhibits promising performance in gate dielectric applications [5], [17], [18]. However, together with these initial studies, the stability of the device should be investigated in various environments including the irradiation field to test the device reliability.…”
In this study, the effects of gamma irradiation on the physical, electrochemical, and electrical properties of Dy2O3/p-Si thin films have been studied. For this, the rare earth oxide (Dy2O3) was deposited onto p-Si wafer by using an e-beam evaporation technique. The evolutions on the crystallographic and morphologic characteristics of the films under gamma irradiation were analyzed by X-ray diffraction (XRD) and Atomic Force Microscopy (AFM), respectively, while irradiation effects on the electrochemistry of the films were characterized by X-ray photoelectron spectroscopy (XPS). Furthermore, variations on the electrical characteristics of Dy2O3/p-Si thin films were also specified by Capacitance-Voltage (C-V) and Conductance-Voltage (G/ω-V) measurements. No significant changes on the crystallographic orientation were observed after gamma irradiation exposures. However, the grain size of the films was increased slightly due to the fact that the local heating aggregated the smaller grains into a bigger cluster. In addition, the surface roughness was increased after irradiation indicating that it deforms the films' surface morphology. Two different intense intermixing phases revealed the presence of the electrochemical analysis of the virgin Dy2O3/p-Si thin films. These phases are Dysprosium sub-Oxide (DyxOy) and Oxygen deficient in Dy2O3 films. After irradiation exposures, Oxygen incorporation, vacancy, and interstitial defects formation were observed in the electrochemical characteristics of the films. On the other hand, the capacitance curves exhibit kinks in the region between depletion and accumulation due to the presence of the intermixing phases of Dy2O3 films. The capacitance of samples significantly increased with the increase of radiation doses, which are correlated with the generated interface state density and/or improvement of dielectric characteristics of Dy2O3 owing to Oxygen diffusion.
“…As a possible replacement for gate dielectrics, Dy2O3 is one of the most promising REO materials owing to its high dielectric constant (k = 14-18), a large energy band gap (4.9 eV), and thermal and chemical stability with silicon [14]- [16]. Researchers have already reported that Dy2O3 exhibits promising performance in gate dielectric applications [5], [17], [18]. However, together with these initial studies, the stability of the device should be investigated in various environments including the irradiation field to test the device reliability.…”
In this study, the effects of gamma irradiation on the physical, electrochemical, and electrical properties of Dy2O3/p-Si thin films have been studied. For this, the rare earth oxide (Dy2O3) was deposited onto p-Si wafer by using an e-beam evaporation technique. The evolutions on the crystallographic and morphologic characteristics of the films under gamma irradiation were analyzed by X-ray diffraction (XRD) and Atomic Force Microscopy (AFM), respectively, while irradiation effects on the electrochemistry of the films were characterized by X-ray photoelectron spectroscopy (XPS). Furthermore, variations on the electrical characteristics of Dy2O3/p-Si thin films were also specified by Capacitance-Voltage (C-V) and Conductance-Voltage (G/ω-V) measurements. No significant changes on the crystallographic orientation were observed after gamma irradiation exposures. However, the grain size of the films was increased slightly due to the fact that the local heating aggregated the smaller grains into a bigger cluster. In addition, the surface roughness was increased after irradiation indicating that it deforms the films' surface morphology. Two different intense intermixing phases revealed the presence of the electrochemical analysis of the virgin Dy2O3/p-Si thin films. These phases are Dysprosium sub-Oxide (DyxOy) and Oxygen deficient in Dy2O3 films. After irradiation exposures, Oxygen incorporation, vacancy, and interstitial defects formation were observed in the electrochemical characteristics of the films. On the other hand, the capacitance curves exhibit kinks in the region between depletion and accumulation due to the presence of the intermixing phases of Dy2O3 films. The capacitance of samples significantly increased with the increase of radiation doses, which are correlated with the generated interface state density and/or improvement of dielectric characteristics of Dy2O3 owing to Oxygen diffusion.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.