2003
DOI: 10.1016/s0169-4332(02)01467-8
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Comparison of nanosecond laser ablation at 1064 and 308 nm wavelength

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Cited by 77 publications
(40 citation statements)
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“…Contrary to it, e.g. for Cu ablation with 308 nm light pulses, higher ablation yields were obtained at lower laser fluence (3-10 J/cm 2 ) than at higher fluence (>10 J/cm 2 ) [41]. The reason is not clear.…”
Section: Excitation Evaporation and Plume Formationmentioning
confidence: 76%
See 2 more Smart Citations
“…Contrary to it, e.g. for Cu ablation with 308 nm light pulses, higher ablation yields were obtained at lower laser fluence (3-10 J/cm 2 ) than at higher fluence (>10 J/cm 2 ) [41]. The reason is not clear.…”
Section: Excitation Evaporation and Plume Formationmentioning
confidence: 76%
“…energy pulses allow evaporation and/or atomization of chalcogenide-based glasses (Table 1), but also of almost any condensed material, e.g. metals [41,85,86], carbon [87], diamond [88], carbides [89], silicides [90], oxides [21,25,34,91], PbTe [43,45,53], HgCdTe [56], CdS [54], CuInSe 2 [55], superconductors [92], hard nitrides [93], ferroelectrics [94], etc. The pulsed laser system is external to the vacuum deposition chamber; the light can be delivered to the holes and hollow structures etc.…”
Section: Excitation Evaporation and Plume Formationmentioning
confidence: 99%
See 1 more Smart Citation
“…Overall, it is difficult to attain stable ablation using the fundamental wave because of the weaker light absorption in the infrared region (Lu et al, 2008). Torrisi et al (2003) investigated the effect of wavelength on laser ablation of solid Cu using a 1064 nm Nd:YAG laser and a 308 nm XeCl excimer laser. They showed that UV laser is more efficient at evaporating the copper atoms, even though infrared radiation has higher ionic kinetic energy and higher plasma temperature.…”
Section: Lasermentioning
confidence: 99%
“…The laser wavelength, energy density, pulse duration, target to substrate distance and a substrate temperature [13][14][15][16] could drastically change mechanical and physical properties of thin films. Appropriate selection of parameters allows producing materials of complex chemical composition and stoichiometry.…”
Section: Introductionmentioning
confidence: 99%