2011
DOI: 10.1166/sl.2011.1575
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Comparison of Hydrogen Sensing Properties of Schottky Diodes Based on SiC and <I>β</I>-Ga<SUB>2</SUB>O<SUB>3</SUB> Single Crystal

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Cited by 7 publications
(3 citation statements)
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“…The I - are similar to the behavior in a conventional gas sensor device with a Schottky diode structure. We have reported on a hydrogen gas sensor with a Schottky diode structure fabricated using a β-Ga 2 O 3 single-crystal substrate (Nakagomi et al, 2011b). The dependence of I -V characteristics on hydrogen concentration is similar to the characteristics of the Pt/Ga 2 O 3 /n-SiC device shown in Fig.…”
Section: Device Evaluationsupporting
confidence: 63%
“…The I - are similar to the behavior in a conventional gas sensor device with a Schottky diode structure. We have reported on a hydrogen gas sensor with a Schottky diode structure fabricated using a β-Ga 2 O 3 single-crystal substrate (Nakagomi et al, 2011b). The dependence of I -V characteristics on hydrogen concentration is similar to the characteristics of the Pt/Ga 2 O 3 /n-SiC device shown in Fig.…”
Section: Device Evaluationsupporting
confidence: 63%
“…Ga 2 O 3 acted as a gas-sensitive electrical resistance even in MOS structure using Ga 2 O 3 layer and SiC reported by Trinchi et al [3]. Nakagomi et al studied hydrogen sensor with Schottky diode structure based on Ga 2 O 3 single crystal [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Nakaomi et al also demonstrated highlysensitive hydrogen gas sensors, which could be operated reliably at high temperatures above 400 • C using the field-effect transistors on Ga 2 O 3 thin film and Schottky diodes on β-Ga 2 O 3 single crystals. [15][16][17][18] It is of great importance to study the hydrogen adsorption on Ga 2 O 3 surface in order to understand hydrogen sensing mechanism and improve its hydrogen sensitivity. Jochum et al found that the hydrogen adsorption on Ga 2 O 3 formed OH below 200 • C and GaH species above 200 • C with Fourier transform infrared spectroscopy.…”
mentioning
confidence: 99%