CMOS-compatible mid-IR metamaterial absorbers for out-of-band suppression in optical MEMS

Ghaderi, M.; Shahmarvandi, Ehsan Karimi; Wolffenbuttel, R.F.

doi:10.1364/ome.8.001696

Cited by 18 publications

(14 citation statements)

References 45 publications

(85 reference statements)

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“…The differential signal has a peak around 4.26 μm in the CO2 detection range and low absorptivity at other wavelengths. More recently, arrays of wavelength-dependent detectors, based on similar plasmonic/metamaterial thermal engineering concepts have been proposed [106,107,108], to enable spectroscopic detection across various bands in the MIR.…”

Section: Path To Miniaturization and Integrationmentioning

confidence: 99%

“…Although PA spectra can be recorded by measuring the sound at different wavelengths of light [79], it requires tunable or multiple MIR sources centred at specific wavelengths, which are not available at low-cost and/or low-power consumption [45]. On the other hand, spectroscopic detection techniques based on arrays of plasmonic detectors [54,106,107,108] can be achieved at very low cost and minimum power consumption.…”

Section: Path To Miniaturization and Integrationmentioning

confidence: 99%

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Towards Integrated Mid-Infrared Gas Sensors

Popa

Udrea

2019

Sensors

208

120

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Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.

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Section: Path To Miniaturization and Integrationmentioning

confidence: 99%

Section: Path To Miniaturization and Integrationmentioning

confidence: 99%

Towards Integrated Mid-Infrared Gas Sensors

Popa

Udrea

2019

Sensors

208

120

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show abstract

“…This leads to a new tool for the optimization of the resonant responses of the system and thus provides tunability. This aim is possible by using MEMS/ NEMS-in which the electrical and mechanical elements are integrated-and also microfluidic channels and stretchable materials in the system [75][76][77][78][79][80][81][82][83][189][190][191][192][193][194][195]. MEMS/NEMS are composed of micro-or nanometer scale components and have the ability to function in the micro-and nano-scale.…”

Section: Active Mpas Based On Mems Microfluidic Channels and Elastimentioning

confidence: 99%

Active metamaterial nearly perfect light absorbers: a review [Invited]

et al. 2019

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Achieving nearly perfect light absorption from the microwave to optical region utilizing metamaterials has begun to play a significant role in photonics and optoelectronics due to their vital applications in thermal emitters, thermal photovoltaics, photovoltaics, sensing, filtering, and photodetection. However, employing passive components in designing perfect absorbers based on metamaterials and photonic crystals imposes some limits on their spectral operation. In order to overcome those limits, extensive research has been conducted on utilizing different materials and mechanisms to obtain active metamaterial light absorbers. In this review paper, we investigate the recent progress in tunable and reconfigurable metamaterial light absorbers through reviewing different active materials and mechanisms, and we provide a perspective for their future development and applications.

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“…The article by Ghaderi et al instead focuses on improving the manufacturability of mid-IR metamaterial absorbers [97]. The novelty of the work is two-fold: 1) the metamaterial design is shape-tolerant such that they are amenable to fabrication using standard i-line UV lithography, and 2) the metamaterial is made out of CMOS-compatible materials including aluminum and SiO 2 .…”

Section: Plasmonic Metals and Nanostructuresmentioning

confidence: 99%

Feature issue introduction: mid-infrared optical materials and their device applications

Mawst

Moss

et al. 2018

Opt. Mater. Express

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The mid-infrared (mid-IR, 2 to 10 μm) is a technologically important spectral regime for sensing, imaging, and communications. In the past few years, there has been a surge of interest in novel mid-IR optical materials as well as their device implementations to address the increasing demands from these applications. The 22 papers in this feature issue represent a diverse cross-section of the latest technological advances in this field, spanning mid-IR light generation, propagation, manipulation, and detection functions in free-space, fiber, and planar platforms. In terms of material systems, semiconductors, glasses, plasmonic metals, as well as nanostructures specifically engineered for the mid-IR band, are all extensively covered. We hope that the readers will enjoy the kaleidoscopic view of the burgeoning field of mid-IR optics and photonics through this feature issue.

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CMOS-compatible mid-IR metamaterial absorbers for out-of-band suppression in optical MEMS

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Cited by 18 publications

References 45 publications

Towards Integrated Mid-Infrared Gas Sensors

Towards Integrated Mid-Infrared Gas Sensors

Active metamaterial nearly perfect light absorbers: a review [Invited]

Feature issue introduction: mid-infrared optical materials and their device applications

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