Chemical vapour deposition of superconductors

Wahl, G.; Schmaderer, F.

doi:10.1007/bf02397041

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Application and Modeling1

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1989

1996

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Cited by 16 publications

(1 citation statement)

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“…Important materials being prepared by CVD for electronic and optic devices include Si, Ge, Si 3 N 4 , SiO 2 , GaAs, CdS, ZnSe, and related compounds (Spear (1982); Green and Levy (1985); Gentilman et al (1981); Hess et al (1985)). Superconducting materials such as Nb 3 Sn, Nb 3 Ge, and NbC x N y (Wahl and Schmanderer (1989)) and YBa 2 -Cu 3 O 7-δ (Kim et al (1991)). Erosion-and corrosionresistant coatings commonly applied by CVD to tooling materials are TiC, TiN, and Al 2 O 3 .…”

Section: Application and Modelingmentioning

confidence: 99%

Chemical Engineering Aspects of Advanced Ceramic Materials

Hlaváček

Puszynski

1996

Ind. Eng. Chem. Res.

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Advanced ceramic materials can be synthesized and processed using a large variety of different techniques. Synthesis and processing methods of oxide and non-oxide ceramic materials is reviewed with emphasis on solution techniques and high-temperature gas phase and condensed phase syntheses. Net-shape methods such as chemical vapor deposition, reaction sintering, joining, and liquid infiltration are presented. Critical aspects of materials synthesis and future research needs are also addressed.

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