Chemical vapor deposition of silver

Yuan, Zheng; Dryden, Neil H.; Vittal, Jagadese J.; Puddephatt, Richard J.

doi:10.1021/cm00057a019

Cited by 95 publications

(71 citation statements)

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“…Details of their structural features are summarized in Table 1. They may be classified into five categories: non-functionalized silver carboxylates (1±4); functionalized silver carboxylates (5±8); disilver dicarboxylates (9±11); silver phenolates (12,13); and silver b-diketonates (14,15). First, all of these complexes have been investigated with temperature-programmed MS to obtain information about their volatility and the occurrence of silver-containing fragments in the gas phase.…”

Section: Resultsmentioning

confidence: 99%

“…From all analyzed complexes, only the trin butylphosphine silver(I) carboxylates (1±4), the phenolate (12), and the bdiketonates (14,15) possess significant volatility. The detection of fragments representing all parts of the molecule was used to validate this; specifically, the phosphine ligand, the building block of the silver salt, and also other fragments containing a silver atom (identified by the isotope pattern of silver) were used in this analysis.…”

Section: Temperature-programmed Msmentioning

confidence: 99%

“…i) Non-volatile, not included in further studies (5±11, 13) ii) Volatile complexes with limited long-term stability under storage conditions (2,4,12). This instability is a major disadvantage since these complexes tend to decompose during storage.…”

Section: Temperature-programmed Msmentioning

confidence: 99%

“…[10,11] However, these complexes have such low volatilities that the conventional evaporation process is useless. Special low-pressure deposition techniques, [12] or special precursor evaporation methods, such as powder flash evaporation, [13] powder feed methods, [14] or aerosol-assisted CVD, [15,16] have been developed. Direct liquid injection is the process of choice to minimize the thermal degradation of the respective precursors.…”

Section: Introductionmentioning

confidence: 99%

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CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Haase¹,

Kohse‐Höinghaus²,

Bahlawane³

et al. 2005

Chemical Vapor Deposition

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Tri-n butylphosphine silver(I) complexes were synthesized and characterized with respect to their suitability for the CVD of silver thin films. The volatility and thermal stability of these complexes were investigated using temperature-programmed and in-situ mass spectrometry (MS). Complexes with smaller carboxylate ligands showed superior long-term stability and had the advantage of evaporation without decomposition. Careful examination of the fragments detected during evaporation and in a CVD reactor allowed us to propose the gas-phase decomposition mechanisms of some potentially suitable silver precursors. Deposition experiments in a cold-wall CVD reactor using selected precursors resulted in smooth and conductive silver coatings.

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Section: Resultsmentioning

confidence: 99%

Section: Temperature-programmed Msmentioning

confidence: 99%

Section: Temperature-programmed Msmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Haase¹,

Kohse‐Höinghaus²,

Bahlawane³

et al. 2005

Chemical Vapor Deposition

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“…Examples include the monomeric three-coordinate (hexafluoroacetylacetonato)(trimethylphosphine)silver(I), [6] [(HFA)(PMe 3 )Ag] and (hexafluoroacetylacetonato) (triethylphosphine)silver(I), [7] [(HFA)(PEt 3 )Ag]. These complexes are volatilized over a heated substrate surface to give thin silver films.…”

Section: Synthetic Considerationsmentioning

confidence: 99%

Inverse CVD: A Novel Synthetic Approach to Metallized Polymeric Films

Southward¹,

Thompson²

1999

Adv. Mater.

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Highly reflective and conductive silver surfaces on flexible polyimide films have been achieved by a novel single‐stage self‐metallizing procedure that utilizes similar chemistry to that involved in CVD. The film is cast as a silver(I)‐doped poly(amic acid) solution. Thermal curing leads to cycloimidization of the polyimide precursor with concomitant silver(I) reduction. The result is a reflective and conductive surface approaching that of the native metal, while the film retains the essential mechanical and thermal characteristics of the parent film.

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CVD of AgI Complexes with Tertiary Phosphines and Perfluorinated Carboxylates—A New Class of Silver Precursors

Szłyk

Piszczek²,

Grodzicki

et al. 2001

Chem. Vap. Deposition

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COOAg (2) have been used as precursors for the CVD of silver layers in the temperature range 493±623 K. The thin films obtained were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM), scanning tunneling electrochemical microscopy (STEM), X-ray photoelectron spectroscopy (XPS), and temperature variable infrared (IR) measurements. The SEM images of Ag films grown from 2 exhibited a surface with a grain size in the range 0.4±1.5 lm, whereas from 1 the size was~0.1 lm. This was confirmed by the STEM studies. The better stability of 1 in the vapor phase was proved by temperature variable IR spectra (373±523 K). Mass spectrometry (MS) images confirmed the presence of the monomeric and dimeric species, and the recombination ions transported in vapors. The XPS image analysis of the silver layers revealed the presence of some carbon impurities. The films demonstrated good adhesion to silicon substrates.

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Chemical vapor deposition of silver

Cited by 95 publications

References 0 publications

CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Inverse CVD: A Novel Synthetic Approach to Metallized Polymeric Films

CVD of AgI Complexes with Tertiary Phosphines and Perfluorinated Carboxylates—A New Class of Silver Precursors

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Chemical vapor deposition of silver

Cited by 95 publications

References 0 publications

CVD with Tri‐nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

CVD with Tri‐nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

Inverse CVD: A Novel Synthetic Approach to Metallized Polymeric Films

CVD of AgI Complexes with Tertiary Phosphines and Perfluorinated Carboxylates—A New Class of Silver Precursors

Contact Info

Product

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CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions

CVD with Tri‐ⁿbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions