2003
DOI: 10.1063/1.1583863
|View full text |Cite
|
Sign up to set email alerts
|

Charge-coupled device area detector for low energy electrons

Abstract: A fast position-sensitive detector was designed for the angle- and energy-selective detection of signal electrons in the scanning low energy electron microscope (SLEEM), based on a thinned back-side directly electron-bombarded charged-coupled device (CCD) sensor (EBCCD). The principle of the SLEEM operation and the motivation for the development of the detector are explained. The electronics of the detector is described as well as the methods used for the measurement of the electron-bombarded gain and of the d… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2004
2004
2014
2014

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 8 publications
(2 citation statements)
references
References 8 publications
0
2
0
Order By: Relevance
“…A Princeton Instruments PIXIS-XO camera designed for X-ray and EUV imaging was used to directly image low energy (0.3-5 keV) electrons with high sensitivity. Back-thinned, backilluminated CCDs have been used to directly detect low energy electrons before [28], but to our knowledge this work is the first time a commercially-available camera has been used to directly image electrons.…”
Section: Methodsmentioning
confidence: 99%
“…A Princeton Instruments PIXIS-XO camera designed for X-ray and EUV imaging was used to directly image low energy (0.3-5 keV) electrons with high sensitivity. Back-thinned, backilluminated CCDs have been used to directly detect low energy electrons before [28], but to our knowledge this work is the first time a commercially-available camera has been used to directly image electrons.…”
Section: Methodsmentioning
confidence: 99%
“…Using A0 and replacing Ayl by W, the above inequality is expressed as 2Ir AO > k--W" (4) With the experimental conditions described here, the right-hand side amounts to 4.9 • 10 -3, which is 5 times greater than the angular size of the interferometer viewed from the collision point. In fact, (4) is written as W > 27rL/(kd) by replacing A0 by d/L, and contradicts the condition that the source should be point-like.…”
Section: Do the Angular Spreads Of The Incident Beams Blur The "Whichmentioning
confidence: 98%